Papers:
Effects of Surface Properties on the Effective Electrical Gap of Microelectromechanical Devices Operating in Contact
The effective electrical gap between two conducting surfaces sandwiching a thin dielectric layer varies with applied voltage and pressure. Improved methods for measuring and modeling this variation are presented. Optical surface profile measurements of fixed-fixed [...]
Modeling and Control of Nanomirrors for EUV Maskless Lithography
The design of mirrors for use in EUV maskless lithography is presented in this paper. We propose a novel nanomirror system with a linear comb actuator, which has favorable stability and performance. A bias voltage [...]
Simulation for Low Temperature Coefficient Design of Piezoresistive and Hall Sensors
Simulation for the temperature coefficient of piezoresistive and Hall sensors is presented. Carrier and ionized impurity concentrations in the n-type silicon gage are calculated from the charge balance equation by applying Newton iteration scheme. The [...]
The Effect of Thermal Boundary Conditions and Scaling on Electro-Thermal-Compliant Micro Devices
Electro-thermal micro actuators that operate by virtue of constrained thermal expansion induced by Joule heating, have recently received considerable attention. We use electro-thermal actuation to create monolithic compliant devices with embedded actuation in which the [...]
Analysis of Anodic Bonding and Packaging Effects in Micro Sensors
Anodic bonding is quite popular in making micro-sensors since it can bond sodium-rich glass to silicon or virtually any metals with good adhesion strength in lower temperature. It is well known that this process will [...]
Design of Piezoresistive Silicon Cantilevers with Stress Concentration Regions (SCR) for Scanning Probe Microscopy (SPM) Applications
This paper describes and evaluates the incorporation of novel Stress Concentration Region (SCR) in silicon based cantilevers to enhance piezoresistive displacement, force, and torque sensitivities. In brief, SCR is a region, on the cantilever, with [...]
Optimal Design of A Tuning Fork Gyroscope and Its Testing Experiment
The eigenfrequency of a MEMS Tuning Fork Gyroscope (TFG) is calculated using a formula derived from Rayleigh method. From this formula, the objective function for the optimal design is established. Then two methods to solve [...]
On Design of a Backplate Used in a Hearing Aid
In this work topology optimization is used to optimize the compliance or the eigenfrequencies of prestressed plates. The prestress is accounted for by including the force equivalent to the prestressing and adding the initial stress [...]
Design and Simulation of A Novel Highly Symmetrical Piezoelectric Triaxial Accelerometer
Li G., Li T., Li Z., Li G., Li T., Li Z., Wang C., Hao Y., Li G., Li T., Li Z., Wu G., Peking University, CN
A monolithic piezoelectric triaxial accelerometer, using a highly symmetric quad-beam structure with a single seismic mass, has been developed. The structure of the accelerometer is analyzed in detail theoretically and numerically. Static and modal simulations [...]
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Industry sector: Sensors, MEMS, Electronics
Topics: Chemical, Physical & Bio-Sensors, MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9666135-7-0