MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Numerics, Algorithms Chapter 11

Reduced-Order Models of Stress-Stiffened MEMS Structures

Authors: M. Varghese, V.L. Rabinovich and S.D. Senturia

Affilation: Massachusetts Institute of Technology, United States

Pages: 493 - 496

Keywords: macromodels, energy methods, MEMS, stress-stiffening, modal-methods

We present a process for generating reduced-order models for stress-stiffened MEMS structures. The models are created using the established CHURN process, which uses non-linear, analytic, energy functions to describe the state of each conservative quasi-static energy domain (electrostatic, magnetostatic, elastostatic) in the MEMS structure. Equations of motion for the structure are constructed from the energy functions using Lagrangian mechanics. Our new contribution is the generation of an accurate analytic function that captures the non-linear elastic potential energy (strain energy) of the structure.

ISBN: 0-9666135-7-0
Pages: 741

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