MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Plenary lectures Chapter 1

Top Down Design of MEMS

Authors: G.K. Fedder

Affilation: Carnegie Mellon University, United States

Pages: 7 - 10

Keywords: MEMS CAD, MEMS design methodology

A top-down design flow for suspended MEMS is described, starting with schematic capture of a design topology, followed by behavioral simulation, layout generation, parasitic extraction, and final verification. Support for this flow requires a MEMS hierarchical circuit representation and mapping of process, materials properties, design rules, and parasitic parameters into appropriate technology files.

ISBN: 0-9666135-7-0
Pages: 741