NSTI Nanotech 2009

Concentric pad and CGI (CNT-Gold Island) System for Sensitive CMOS Bio-Chips

S.M. Seo, J-H Cheon, H.J. Kwon, J.W. Ko, T.J. Kang, Y.H. Kim, Y.J. Park
Seoul National University, KR

Keywords: carbon nanotube, CGI(CNT-Gold Island), Bio sensor


We propose a CMOS pad structure for easy integration of the CNT network on a conventional CMOS chip without additional critical mask process. The simple concentric electrode structure made of the aluminum layer, combined with the CNT network with the gold island structures on top of it, gives not only the process simplicity to lead to the general CMOS bio chip, but also the enhancement of the sensitivity in detection of the molecule binding event in the aqueous environment. In this abstract, we will show how the concentric pad structure leads to the process simplicity and enhancement in sensitivity together with initial data for DNA sensing.
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