2008 NSTI Nanotechnology Conference and Trade Show - Nanotech 2008 - 11th Annual

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Physically-Based High-Level System Model of a MEMS-Gyroscope for the Efficient Design of Control Algorithms

R. Khalilyulin, G. Schrag, G. Wachutka
Munich University of Technology, DE

MEMS gyroscope, damping, package vibrations, manufactoring tolerances

We present a high-level model of a dual gimbaled mass gyroscope, which provides an accurate physical description of the impact of external and internal disturbances on the output signal, but which also allows for the efficient analysis and optimization of the full sensor system including the electronic circuitry for drive, control, and signal conditioning. The dynamics of the gyroscope is described by a reduced-order high-level model with 24 degrees of freedom, which is based on the Langrangian equations of motion. Internal disturbances (manufacturing tolerances, e.g.) as well as external impact factors (pressure-dependent viscous damping, shock, vibrations of the housing, etc.) have been included in the model equations by introducing physically-based, parametrized functions extracted from detailed FEM or mixed-level simulations. After calibration, detailed sensitivity analyses of the sensor output signal with respect to the individual disturbing factors have been carried out. Since the proposed high-level model combines computational efficiency with physical transparency and accuracy on system level, it provides the proper basis for on-going research activities focusing on the design of control algorithms which minimize or even eliminate these impacts on the sensor system and, thus, enhance the quality of signal conditioning.

Nanotech 2008 Conference Program Abstract