2008 NSTI Nanotechnology Conference and Trade Show - Nanotech 2008 - 11th Annual

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Clean Technology 2008

Fabrication and Characterization of Thermo-pneumatic Peristaltic Micropumps

H-H Liao, W-C Liao, Y-J Yang
National Taiwan University, TW

peristaltic micropump, thermopneumatic, MEMS, microfluidics

In recent years, the application of microelectromechanical systems (MEMS) technology on biomedical fluidic analysis has progressed rapidly. By minimizing the system, the time of analysis and reaction can be effectively shortened. Also, the quantities of sample/reagents as well as labor can be reduced efficiently. In micro-fluidic system, the key device to drive fluids is micropumps. Mechanical micropumps can pump most fluids, although they are usually more difficult to fabricate and operate than the non-mechanical ones. There are a few types of actuation for mechanical micropumps, such as piezoelectric[1], electromagnetic[2], electrostatic[3], pneumatic[4] and thermopneumatic[5,6]. Thermopneumatic micropumps have the advantages of large volume stroke and low voltage. Besides, the peristaltic mechanism can be operated as the dynamic valves without complicated structures and fabrication process. In this paper, we design and fabricate thermopneumatic peristaltic micropumps with different configurations. The measurement and characterization of these devices will also be presented.

Nanotech 2008 Conference Program Abstract