2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Comparison of Piezoelectric MEMS Mechanical Vibration Energy Scavengers

M. Marzencki, S. Basrour, B. Belgacem, P. Muralt and M. Colin
TIMA Laboratory, FR

energy scavenging, piezoelectric MEMS

This paper presents a design, modelling, fabrication and experimental test results of MEMS mechanical vibration energy scavenging devices for micro power generation. There is a growing need for such structures in the field of wireless sensor networks, where increasing the autonomy of the node is a crucial issue. In our case, the transduction is performed using the piezoelectric effect and the devices are entirely made using microfabrication techniques. This is a continuation of work already presented that proposes improved devices and use of new materials

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