2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Modeling and Dynamics of Coupled Dome-shaped Micromechanical Oscillators

T. Sahai and A.T. Zehnder
Cornell University, US

MEMS, dynamics, buckling, synchronization, Galerkin projections

In this work we analyze a feasible approach for constructing coupled micromechanical oscillators that synchronize. For this purpose we use dome shaped micro-oscillators that have previously been used to build radios. These oscillators are fabricated by buckling a thin film of polysilicon, giving rise to a dome-shaped structure. They are thermally excited using resistive heating. Motion feedback from the detection mechanism into the thermal actuation drives these oscillators into limit cycle oscillations. A model for a single oscillator is constructed by performing a Galerkin projection on the governing nonlinear PDE. The thermal part is modeled by solving the heat equation on a disk. The resulting model predicts the presence of experimentally observed stable limit cycle oscillations. Two limit cycle oscillators are then mechanically coupled. The regions of synchrony are computed by changing the coupling parameter and the detuning between the two oscillators. As expected, an increase in the detuning requires stronger coupling to synchronize the oscillators.

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