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Preservation of DNA and Protein Biofunctionality for Bio-MEMS & NEMS Fabrication

D. Trau, J. Jie and N.J. Sucher
National University of Singapore (NUS), SG

microfabrication, DNA, protein, biomicrodevices

Microfabrication processes especially in silicon are not compatible with biomolecules. For example, silicon processing is commonly performed at high temperatures and makes use of aggressive chemicals. Under these conditions biological materials are denaturated or decomposed. Currently biological materials can only be combined with microdevices after the last microfabrication production step.
Here we report the integration of DNA and protein into the microfabrication process using a gold passivation mask preserving their biofunctionality. This technology enables the integration of DNA and potentially other biomolecules into mass scalable microfabrication processes for biomedical devices, biochips, and biosensors.The gold film served as a biocompatible and stable passivation mask in the subsequent microfabrication processes. Biomolecules were patterned and aligned with microstructures formed by wet etching and microelectrodes created by a metal deposition/lift-off process. After microfabrication the gold passivation mask was removed under mild conditions to uncover the DNA or proteins. A prototype device was fabricated and biofunctionality of DNA was almost completely preserver; demonstration the full integration of DNA into silicon microfabrication for the first time.

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