Nanotechnology Conference and Trade Show - Nanotech 2006
> Program > Technical Conferences > Business & Development > Nano Impact Workshop > Nanotech Job Fair > Expo
Index of Authors
Index of Keywords
Confirmed Speakers
Conferences & Symposia

Conference Proceedings

Conference Technical Proceedings

The Bonding Technology for Microchannels with Electrode Patterns on the Glass Substrates

S.H. Parng, H.J. Yang and T.K. Shia
Microsystem Technology Common Laboratory, TW

fusion bonding, microchannel, electrode, glass, surface roughness

Objectives: Bonding surface preparation, process conditions, and integrated on-chip metal sheet resistance variation during bonding process were investigated in this work.
Methods: We flatten the surface of the etched micro-channels with a fresh solution of HF:H2O (1:1.5) at 20℃ for 10 seconds before fusion bonding. The electrodes layer of Titanium/Platinum (500A/2000A) on glass substrate would be cleaned with isopropyl alcohol (IPA) solution for 3 minutes. All of the clean steps followed by a rinse in DI water. The drilled channel chip was thermally bonded to the RTD/heater chip used a programmable vacuum furnace
Results: Spectrophotometer images and surface roughness were compared for quantification of the surface microtopography with and without etching chemical treatment. The smoother surface can be achieved on glass wafers treated with diluted HF solution than those untreated. The excellent glass fusion bonding result can be achieved no matter Ti/Pt films are fabricated on the glass surface or not. From these SEM photos, it can be seen that the interface of the two glass plates is not observable. The average resistance drops by about 26% after bonding, whereas the bonding process improves the stability of the resistance by around 31% standard deviation individually.

Back to Program

Sessions Sunday Monday Tuesday Wednesday Thursday Authors

Nanotech 2006 Conference Program Abstract

Nanotechnology Conference | Terms of use | Privacy policy | Contact | NSTI Home
Program | Technical Conferences | Business & Development | Nano Impact Workshop | Nanotech Job Fair | Expo |
Nanotech 2006 Home | Press Room | Venue | Subscribe | Site Map
Names, and logos of other organizations are the property of those organizations and not of NSTI.
This event is not open to the general public and NSTI reserves the right to refuse admission and participation to any individual.