Nanotechnology Conference and Trade Show - Nanotech 2006
> Program > Technical Conferences > Business & Development > Nano Impact Workshop > Nanotech Job Fair > Expo
Index of Authors
Index of Keywords
Confirmed Speakers
Conferences & Symposia

Conference Proceedings

Conference Technical Proceedings

Smart Pressure Sensor on SOI optimized by Finite Element Analysis for Heatspreader Integration

B. Bercu, L. Mont├Ęs and P. Morfouli

finite element analysis, pressure sensor, micromachining SOI, optimization, heatspreader

Finite element analysis is used to maximize the response of the piezoresistive pressure sensor into an integrated heatspreader, designed for high-power electronic device cooling. This study shows the possibility of obtaining small area piezoresistive pressure sensors with an excellent pressure sensitivity and negligible variation with temperature which is essential for heatspreader applications. We investigate the impact of the membrane thickness and of the size and positioning of the strain gauges. We show that an ultra-thin membrane micromachined in SOI leads to a considerable increase in sensor response and a good linearity in the pressure operation domain. The optimal gauge dimensions have been consequently determined, as well as the optimal gauge positioning on the membrane. In addition, a substantial decrease in the membrane residual stress can be achieved by adding a SiO2 layer which preserves a good linearity and sensitivity of the sensors response. The sensor shows a good response linearity for the specified pressure domain while SOI technology provides a good reproducibility and uniformity of the membrane thickness on the wafer. These optimized parameters have been successfully implemented in the design and fabrication of the first prototype of a heatspreader with integrated sensors.

Back to Program

Sessions Sunday Monday Tuesday Wednesday Thursday Authors

Nanotech 2006 Conference Program Abstract

Nanotechnology Conference | Terms of use | Privacy policy | Contact | NSTI Home
Program | Technical Conferences | Business & Development | Nano Impact Workshop | Nanotech Job Fair | Expo |
Nanotech 2006 Home | Press Room | Venue | Subscribe | Site Map
Names, and logos of other organizations are the property of those organizations and not of NSTI.
This event is not open to the general public and NSTI reserves the right to refuse admission and participation to any individual.