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Event Contact
696 San Ramon Valley Blvd., Ste. 423
Danville, CA 94526
Ph: (925) 353-5004
Fx: (925) 886-8461

Raith USA, Inc.

Booth: 104


Nanotechnology research brings new challenges to engineers and scientists of many different fields. The need to interface nano-devices to a macroscopic world is a common challenge to most of them. They will have to FABRICATE, RELOCATE, MODIFY and MEASURE at dimensions where most instrumentation cannot operate effectively. RAITH has addressed this need with a new nano-engineering tool, the e_LiNE.

Beyond standard e-beam lithography and inspection, this new instrument offers several more functions allowing users to address all these tasks in-situ, with one new comprehensive tool.

The e_LiNE includes leading edge performance in these following tasks:

  • High resolution electron beam imaging
  • Nano-scale fabrication through electron beam lithography
  • Easy relocation and navigation with a laser-interferometer sample stage
  • Precise measuring with beam based metrology
  • Analytical functions through integrated X-ray microanalysis
  • Electron beam induced deposition and etching by 3 or 5 gas injectors
  • Testing and manipulation with up to 4 mechanical probes ....... and more

Visit the RAITH booth for more information on the complete product line and the new e_LiNE.

Web site:


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