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Danville, CA 94526
Ph: (925) 353-5004
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Interferomet Ltd

Booth: 216

Sub-Nanometric Metrology

Interferomet Ltd

Interferomet is a new company that has developed a family of high precision interferometers, based on an innovative common-path optical configuration, for the accurate dimensional measurement of the position and movement of surfaces at the sub-nanometric level.

Applications include measurement of surface motion, vibration, surface profiling. Using a dual system in a confocal arrangement examining MEMS devices, film thickness and flexure can be measured simultaneously.

Typical accuracies are:

  • Resolution: + 1 nm over 25 mm or 1,000 mm, DC coupled
  • Resolution: + 1pm over 10 nm, AC coupled

All instrument configurations incorporate the Interferomet AIMS™ Interferometer (Adaptive Interferometric Metrology System).

Web site:


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