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Nano Science and Technology Institute 2002 NSTI Nanotechnology Conference & Trade Show
Nanotech 2002
Index of Authors
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Nanotech 2002 Conference Technical Program

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Keynote Presentations

Conference at a Glance

Nanotech Calendar
Nanotechnology Calendar Printable calendar (PDFTM)

Hi-tech Business Formation/Financing Panel - IP Ownership Law and Policies

Neil Aronson
Allan Weeks
Mintz, Levin, Cohn, Ferris, Glovsky and Popeo, P.C., Boston, USA

On Monday evening (April 22, 2002), there will be two presentations featuring:

  1. Two partners from the Boston office of Mintz Levin Cohen Ferris Glovsky and Popeo, PC, who, respectively, specialize in new hi-tech business formation/financing and computer system transactions
  2. Representatives from academia and industry who are knowledgeable in software ownership and licensing concepts

The first presentation, from 6:00 PM to 7:00 PM, will address the legal and business issues associated with forming a new business entity, acquiring/assuring ownership of IP and other assets, compensation and stock ownership plans, obtaining third party financing, employment (including trade secrets matters) considerations, taxes and other initial concerns for a start-up hi-tech business.

The second presentation, from 7:00 to 8:00 PM, will be in a panel format that will address the current state of IP ownership law and policies in universities and then move to what is expected to be a lively discussion, with audience participation expected, of the "pros" and "cons" of proprietary, open source and public domain software, as asserted and defended by the advocates of each status.

Special Sessions and Session Organizers

Molecular and Nanoelectronics

Alex Demkov, Physical Sciences Research Labs, Motorola Inc.,
M.P. Anantram, NASA Ames research Center,

With the size of the electronic devices becoming comparable to that of molecular systems, nano and molecular electronics become competing alternatives for future electronics. Theoretical methods used in both fields are rather similar in their mathematical form and in their shortcomings. Experiments are difficult to do and to interpret. The focus session will provide a forum to discuss the future of the electronics research, and is meant to highlight the importance of novel theoretical/computational approaches to electronics in the nano-meter scale. Papers modeling nanostructures using ab initio (quantum chemistry and solid state physics), tight-binding, molecular dynamics and other approaches are welcome. Papers are solicited including (but not limited to) the following areas:

  • molecular electronics
  • computational nanoelectronics
  • silicon, BN and carbon nanotubes
  • DNA transport
  • full band modeling in quantum transport
  • novel nano-scale device structures
  • modeling of molecular scale logic gates

Equilibrium and Nonequilibrium Statistical Mechanics Modeling of Soft Condensed Matter

S.J. Paddison, Motorola, Los Alamos National Laboratory,

Nanoscale Modeling of Front-End Processing in Silicon

Wolfgang Windl, Motorola,

Mechanical Properties at the Nanoscale

Murray Daw, Clemson University,

Computer Aided Drug Design

Kurt Krause, University of Houston,

Extended-Scale Atomistic Simulation Methods

Arthur F. Voter, Los Alamos National Laboratory,

While parallel molecular dynamics simulation can now be applied to billions of atoms, encompassing an entire nanodevice, time scales are still mired in the nanoseconds. This makes it impossible to properly study synthetic processing steps (e.g., epitaxial growth or self assembly), mechanical behavior during use, or stability against diffusional degradation. Recent developments in pushing the time scale for activated processes hold promise for alleviating this problem. These include accelerated dynamics methods, novel approaches for finding saddle points and transition trajectories, and on-the-fly kinetic Monte Carlo methods. Because these methods typically scale poorly with system size, length scales again become an issue as we try to reach relevant times and sizes simultaneously. Adaptation of approaches such as the quasi-continuum method may be powerful in this regard. This symposium will focus on recent developments in these time- and length-scale methods, highlighting what is now possible and what is still impossible, with an emphasis on discussion of how to push further.

Interdisciplinary Design and Simulation Methods for Micro-and Biomedical Fluidic Applications

Steffen Hardt, Institute of Microtechnology, Mainz, Germany,

Simulation of Quantum Effects in Semiconductor Microstructures at MSM 2002

David Ferry, Arizona State University,

This session will address the actual methodology of simulations used for the analysis of semiconductor microstructures, particularly devices.

Fundamentals in Microsystems

Wenjing Ye Georgia Institute of Technology,
John Pelesko, Georgia Institute of Technology,

Focus on the application of mathematical modeling and numerical simulation to the exploration of questions of fundamental interest to the MEMS community. These questions may arise in any domain, i.e., thermal, electromagnetic, fluidic or mechanical, and may be device oriented or more basic in nature. Speakers whose work demonstrates the interplay between modeling, simulation and experiment are especially desired.

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Techniques for Extracting Low-Order Micromachined Device Models from Physical Simulation

Prof. Jacob White, Massachusetts Institute of Technology,

Integrated circuit fabrication facilities are now offering designers the ability to integrate digital and analog circuitry with micromachined devices, but the lack of system-level verification and optimization tools make such mixed-technology microsystems extremely difficult to design. In particular, it is very difficult to simulate a system with micromachined devices because there are no generally effective techniques for generating low-order, system-level, models for the those devices. Although it is possible to develop low-order models of micromachined devices by hand, it would be vastly more effective if it were possible to automatically derive such models directly from detailed physical simulation. Research over the past decade on automatic model reduction has lead to enormous progress in strategies for linear problems, such as the electrical problems associated with interconnect and packaging, but these techniques have been difficult to extend to the nonlinear problems associated with micromachined devices.

In this tutorial we will use examples to describe the challenges associated with automatic low-order model generation, and will then outline the commonly used methods which use a form of "curve-fitting". We will then describe some of the more recently developed methods for linear problems in the broader context of projection schemes, and categorize the techniques. Finally, we will discuss the most recent developments in nonlinear model reduction including the quadratic reduction methods and the trajectory linearization approaches. The tutorial is intended to provide the nonspecialist with a firm grasp of the issues, while still providing specialists with a clear description of the latest techniques.

The tutorial will take place Tuesday afternoon, April 22rd 2002, at 5:30 pm. The price is $45.00 and includes course notes as well as a complimentary tropical cocktail, which will be served during the break. Places are limited to the first 20 registrants.

Design of Experiments

Prof. Selden Crary, Crary Group,

Design of experiments refers to a set of powerful statistical methods for determining settings of independent experimental variables, prior to experimentation, in order to make meaningful inferences based upon subsequent measurements or simulations. This tutorial will provide an introduction to the capabilities of these methods, using examples of MEMS designs for physical experimentation (non-deterministic experiments) and designs for computer simulations (deterministic experiments), with emphasis on modern techniques, many of which have been pioneered by the presenter.

The tutorial will take place Monday evening, April 22nd 2002, at 7:30 pm. The price is $25.00 and includes course notes. Places are limited to the first 20 registrants.

Hands on Wave Mechanics Tutorial

This session provides a hands-on tutorial on the physical side of wave mechanics. In all empirical approach is explored through the application of gravity on wave/body interactions. The tutorial will meet during all normal session breaks on the beach directly behind the hotel. Appropriate attire is required.

Seven Hundred and Twenty Nine, and the Next Decimal

Andreas Wild, Motorola
Conference Banquet Presentation

We model the World using ideas validated by numbers. 2400 years ago, Plato developed a quantitative model for the moral life. He determined how much more pleasurable is the life of a good and just man, respectively how much more miserable is the life of a bad and unjust man: precisely 729 times (validation pending !).

A precise number, no matter how far behind the decimal point, means higher knowledge: discrepancies invalidate our concepts. Historically, increased precision forced us to eliminate from our models elegant Platonic ideas, such as just intervals, whole numbers, rational relationships, straight lines, circles, the sphere , and our flattering position in the center of the Universe.

Understanding the Universe as a dynamic system implies its irreducible unpredictability. Simulations, predictive in nature, are only possible with limited precision within limited space-time intervals. To expand our horizon, we strive for the model delivering the next decimal.©

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ANSYS Inc. MEMS Workshop/Tutorial

Dale Ostergaard & Paul Lethbridge, ANSYS Inc.

ANSYS Inc. will be providing a workshop showcasing upcoming MEMS analysis features in the forthcoming release of ANSYS/Multiphysics 6.1 (commercial release in April 2002).

Some of the technologies which will be demonstrated include:

  1. A 2-d fully-coupled dynamic electromechanical transducer element for electrostatic actuation of MEMS structures.
  2. Coupled dynamic Fluid-Structure interaction (with multiphysics capability)
  3. A "beta" release of a nonlinear dynamic macro-modeling tool for fast simulation of coupled electro-elastic structures, including exporting of VHDL-AMS dynamic macromodels.

Wine and cheese will be provided, plus there will also be a drawing for some much sought after ANSYS merchandise.

This workshop is free of charge to MSM and ICCN attendees.

SUGAR: A MEMS Simulation Program

David Dindel, University of California, Berkeley and University of California, Davis,

SUGAR is a system level simulation program for 3D MEMS. It combines approaches similar to those used in circuit simulation, structural dynamics, and other disciplines, but is specially designed for mixed-domain microsystems. As a system simulation tool, SUGAR allows users to describe complex devices at a high level of abstraction and quickly determine the approximate device behaviors for a tight design cycle. SUGAR is integrated into the familiar Matlab environment, so that users can exploit the full power of Matlab while developing simulations. Users can also extend SUGAR with new models and analysis routines written in Matlab.

Link to more detailed information about this workshop.

Challenging Microfluidic and Bio-Microfluidic Simulations

Michael Showalter, CFD Research Corporation,

Join us for a demonstration of some challenging microfluidic and bio-microfluidic simulations using CFD-ACE+. CFD-ACE+ is a multi-disciplinary analysis software ideal for MEMS and BioMEMS applications. The demonstration will focus on challenging and interesting modeling examples of microfluidic applications, including microdispensers, bioreactors, micro fuel cells, free surface filling, electrokinetic sample focussing, and more!

This workshop is free of charge to MSM and ICCN attendees.

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3 Day Workshop on Compact Modeling (WCM-MSM 2002)

Chairman: Prof. Xing Zhou, Nanyang Technological University, Singapore,

Click here to access the dedicated Workshop on Compact Modeling web page containing links to presentation slides.

As the mainstream MOS technology is scaled into the very-deep-submicron (VDSM) era, development of a truly physical and predictive MOSFET compact model (CM) for circuit simulation that covers geometry, bias, temperature, DC, AC, RF, and noise characteristics becomes a major challenge. There exist a large number of CM development efforts that address the new challenges in theoretical models as well as industrial applications. It would be beneficial to bring together researchers and CM developers to share their ideas and insights on the current needs and future trends in CM development in the context of VDSM technology and circuit as well as system-on-chip (SOC) design.

Workshop on Compact Modeling (WCM) is one of the first of its kind in bringing people in the CM field together. The objective is to create a truly open forum for discussion among experts in the field as well as feedback from technology developers and circuit designers. It consists of a 2 day Invited-Speaker Session, an Evening Panel Session, and a Tutorial Session. Regular papers are also solicited to follow the above sessions in the Contributed-Paper Session. The topics are centered at bulk-Si and SOI MOSFET compact models for circuit simulation to address the following issues:

  • Physics-based I-V model formulations
  • Scalable AC/RF/noise models
  • Predictive models with process correlation
  • Statistical modeling with compact models
  • Compact model with higher-order (atomic-level) effects
  • Parameter extraction
  • Global vs local optimization
  • Equivalent circuit generation from numerical simulation
  • Compact solution from surface-potential-based models
  • Benckmark tests and model comparisons
  • Compact models for SOI MOSFETs
  • Interconnect modeling in CMOS technology
  • Role of CM in bridging technology development, TCAD, and circuit design
  • Trends and needs in compact models in the VDSM era

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WCM Invited-Speaker Session

There are 23 invited speakers from all over the world (10 countries) to present their work and their views on compact modeling.

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WCM Evening Panel Session on Trends and Needs in Compact Models in the SOC Era

An evening panel discussion on the general topics of compact modeling is organized. The topic is on the trends and needs of compact models from the perspectives of the model developers, device physicists, technology developers, CAD vendors, and circuit designers.

Moderator: Narain Arora, Simplex Solutions, USA.


  • Peter Bendix, LSI Logic, USA
  • Britt Brooks, Texas Instruments, USA
  • Mansun Chan, Hong Kong University of Science and Technology, Hong Kong
  • Christian Enz, Swiss Center for Electronics and Microtechnology, Switzerland
  • Daniel Foty, Gilgamesh Associates, USA
  • Gennady Gildenblat, Pennsylvania State University, USA
  • Dirk Klaassen, Philips Research Laboratories, The Netherlands
  • Mitiko Miura-Mattausch, Hiroshima University, Japan

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WCM Tutorial Sessions

Five tutorials are offered by the invitees on special topics, which will be arranged in series with the Invited-Speaker Session (in parallel with other MSM2002 sessions) for the general audience. Details about the tutorials will be posted later.

  • Submicron Circuit Design with BSIM3/4
    Mansun Chan, Hong Kong University of Science and Technology, Hong Kong
    Description of Tutorial
  • MOS Transistor Modeling for RF IC Design
    Christian Enz, Swiss Center for Electronics and Microtechnology, Switzerland
    Description of Tutorial
  • MOS Modeling, Design Quality, and Modern Analog Design
    Daniel Foty, Gilgamesh Associates, USA
    Description of Tutorial
  • An Introduction to MOS Model 11
    Dirk Klaassen, Philips Research Laboratories, The Netherlands
    Description of Tutorial
  • Model Equations of the Self-Consistent Surface-Potential MOS-Model HiSIM
    Mitiko Miura-Mattausch, Hiroshima University, Japan
    Description of Tutorial

Contributed-Paper Session

Regular contributed papers related to the field of compact modeling are solicited for oral presentations, which will form part of the WCM-MSM2002 event. Check the website for the final program.

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