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Nano Science and Technology Institute 2002 NSTI Nanotechnology Conference & Trade Show
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ICCN 2002
MSM 2002
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696 San Ramon Valley Blvd., Ste. 423
Danville, CA 94526
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Fifth International Conference on
Modeling and Simulation of Microsystems

MSM 2002

April 22-25, 2002
San Juan Marriott Resort & Stellaris Casino
San Juan, Puerto Rico, U.S.A.

The largest gathering in the field worldwide, MSM is the premier technical forum for presenting the latest research and development in modeling and simulation methods, tools and applications in the MEMS, microelectronic, semiconductor, sensor, materials and biotechnology fields.

The 2002 ACRS Joint Meeting, MSM & ICCN Conference will be held at the San Juan Marriott Resort & Stellaris Casino, San Juan, Puerto Rico, U.S.A. Located on the beach in downtown San Juan, this world class resort offers the tropical atmosphere you expect when you dream of your ideal Caribbean Island vacation.

The conference will start Sunday late afternoon with registration and reception, and adjourn Thursday afternoon. Technical sessions, and the vendor exhibition run Monday through Thursday. Conference registration and housing will officially open July 2, 2001.

The conference Technical Proceedings, consisting of articles submitted by authors of both oral and poster presentations will, be distributed to participants at registration.

In addition to the Technical Program, an exciting series of Social Events are being prepared to allow attendees ample opportunity to interact socially and enjoy the sights and sounds of this tropical island setting.


The goal of MSM is to bring together researchers, designers, programmers and vendors involved in microsystem developments (MEMS microelectronic, semiconductor, sensor, materials and biotechnology fields). In an effort to dramatically shorten development time and reduce prototyping costs, simulation activities have experienced phenomenal growth, generating a large number of point solutions, as well as integrated tools. MSM provides a forum for microsystem simulation specialists, allowing them to be exposed to the state of the art modeling techniques currently implemented in academic or industrial research, encouraging a free exchange of ideas and generating synergies between adjacent specialties. Finally, MSM strives to help advanced modeling techniques diffuse into industry and research centers by organizing workshops, demonstrations and short courses.

MSM Topics and Application Areas


  • Mathematical Modeling and Scaling Laws
  • Numerical Methods
  • Finite and Boundary Element Methods
  • Process, Device and Circuit Simulation
  • Model Calibration, Validation and Metrology
  • Equipment Modeling
  • Co-simulation and Optimization
  • System and Multi-level Modeling
  • Characterization and Reliability
  • Data Bases, Data Exchange and Translators


  • Semiconductors and Microelectronics
  • Quantum Effects, Quantum Devices and Spintronics
  • Advanced Packaging and Interconnects
  • Micro Electro Mechanical Systems (MEMS)
  • Smart Sensors and Structures
  • Advanced Lithography and Photonics
  • Biotechnology
  • DNA Chip Technology and Genomics
  • Microfluidic Systems
  • Electromagnetics, RF, Compact Modeling and Signal Integrity
  • Artificial Intelligence and Expert Systems

Sponsored and Endorsed by

  • National Science Foundation
  • Defense Advanced Research Projects Agency
  • American Physical Society
  • Society for Industrial and Applied Mathematics
  • Alfred P. Sloan Foundation
  • Applied Computational Research Society
  • Institute of Electrical and Electronics Engineers - Electron Devices Society
  • CFD Research Corporation
  • Motorola
  • Coventor, Inc.
  • Intellisense Corp.
  • Molecular Simulations Inc.
  • Swiss Federal Institute of Technology of Lausanne
  • TIMA-CMP Laboratory, France
  • Ibero-American Science and Technology Education Consortium
  • International Association for Mathematical and Computer

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