Authors: K. Hahn, D. Ortloff, M. Mielke, R. Brueck
Affilation: University Siegen, Germany
Pages: 493 - 496
Keywords: MEMS product engineering, process design, process verification
The development of micro and nano tech devices such as MEMS (micro-electro-mechanical systems) and NEMS (nano-electro-mechanical systems) based on semiconductor manufacturing processes comprises the structural design as well as the definition of the manufacturing process flow. The approach is characterized by application specific product engineering (PE) flows, i.e. design and manufacturing processes are depending on the later product. For micro and nano products technological constraints have a great impact on the device design and vice-versa. In the first part of this paper we introduce a comprehensive methodology for customer-oriented product engineering of MEMS products taking into account the specific needs of SMEs. MEMS/NEMS product development tailored towards a distributed, networked operation between customers, designers and semiconductor manufacturing partners are in the focus of this methodology. Based on this an environment was developed providing central data and workflow management for design and manufacturing knowledge, handling the whole range of product engineering related information and their complex relationships. The manufacturing process development is a central part of this holistic approach and is supported by XperiDesk, a CAD environment for the management and the design of thin-film-based MEMS fabrication processes. This environment has been developed and commercialized by the authors.