Authors: V. Janicek, M. Husak, J. Formanek, J. Jakovenko
Affilation: FEE CTU in Prague, Czech Republic
Pages: 118 - 121
Keywords: MEMS, energy harvesting, electrostatic, generator
This paper discusses the design, optimization, simulation and fabrication of 3D electrostatic MEMS energy harvester. It is one part of self-powered microsystem. It is able to work in all 3 axis which increases the efficiency. The first modal frequency of 108 Hz is really low in comparison with occupied place (only about 16 sqmm). The structure can also be reconfigured to work as a 3D accelerometer.