 | Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Chapter 3: MEMS & NEMS Devices & Applications |
| - | Gas sensor device based on a SnO2 nanowire network for increased sensing performances |
| | E. Brunet, G.C. Mutinati, S. Steinhauer, A. Koeck |
| | AIT Austrian Institute of Technology GmbH, AT |
| - | Thermal-managed sputtered micro machined gas chromatography columns for oilfield applications |
| | R. Haudebourg, J. Vial, D. Thiébaut, P. Sassiat, I. Azzouz, K. Danaie, B. Bourlon |
| | Schlumberger, FR |
| - | NH3 sensing properties of centimeter scaled CVD graphene in ambient condition |
| | J. Lim, R. Anoop, J.H. Kim, J. Yoon, H-R Ahn, S. Song, Y-J Kim, S.C. Jun |
| | Yonsei University, KR |
| - | A MEMS-type Micro Sensor for Hydrogen Gas Detection |
| | J.-H. Yoon, B.-J. Kim, J.-S. Kim |
| | University of Seoul, KR |
| - | 3D Electrostatic Energy Harvester |
| | V. Janicek, M. Husak, J. Formanek, J. Jakovenko |
| | FEE CTU in Prague, CZ |
| - | MEMS Strain Sensors with High Linearity and Sensitivity with an Enhanced Strain Transfer Mechanism for Wind Turbine Blades |
| | M. Moradi, S. Sivoththaman |
| | University of Waterloo, CA |
| - | In situ monitoring of temperature and voltage in lithium-ion rechargeable batteries using flexible micro two-in-one sensors |
| | S-J Lee, C-Y Lee, M-S Tang, P-C Chen, Y-M Chang |
| | Yuan Ze University, TW |
| - | Electrical Nerve Agents Sensors Based on Chemically Functionalized Nanomaterials |
| | J.-P. Simonato |
| | CEA, FR |
| - | Effect of CuO/water nanofluid in the enhancement of convective heat transfer for electronic cooling |
| | P. Selvakumar, S. Suresh |
| | National Institute of Technology, Tiruchirappalli, IN |
| - | High Performance Sputtered PZT Film for MEMS applications |
| | Y. Hishinuma, Y. Li, J. Birkmeyer, T. Fujii, T. Naono, T. Arakawa |
| | FUJIFILM Dimatix, US |
| - | Novel three-dimensional porous film for single-cell microarray applications |
| | S. Ranjan, Z. Yong |
| | National University of singapore, SG |
| - | MEMS Based AC Voltage References Toward Metrological Applications |
| | H. Camon, A. Bounouh, F. Blard, D. Bélières |
| | LAAS/CNRS, FR |
| - | An optofluidic device for characterizing the effect of viscosity and density on mass transfer |
| | M.I. Lapsley, N. Nama, S. Yazdi, T.J. Huang |
| | Pennsylvania State University, US |
| - | Novel MEMS-Based Diffractive Spatial Light Modulator |
| | H. Woo, S. Li, A.J. Cable |
| | Light Blue Optics, Inc., US |
| - | Fabrication and Characterization of HAR Microfluidic Device to Concentrate Microalgae |
| | V. Singh, Q. Nguyen, J. Goettert, D. Yemane, J. Bargiel, C. Lane, F. Stephenson |
| | Louisiana State University, US |
| - | Fabrication and characterization of liquid metal-based micro-electromechanical DC-contact switch for RF applications |
| | E. Cagatay, Y. Damgaci, B.A. Cetiner, N. Biyikli |
| | Bilkent University - UNAM, TR |
| - | Is one gyroscope enough? |
| | M. Capovilla |
| | STMicroelectronics, US |
| - | Advances in MEMS Fabrication for Fabless MEMS Companies |
| | M. Lim, M. Daneman |
| | InvenSense, US |
| - | A Novel Pneumatically Driven SU-8 Microvalve for High Speed Gas Chromatographic Applications |
| | A. Nubile, A. Poggi, E. Cozzani, I. Elmi, S. Zampolli, M. Messina, G.C. Cardinali, F. Mancarella, M. Belluce |
| | CNR, IT |
| - | Optimised Piezoelectric PZT Thin Film Production on 8” Silicon Wafers for Micromechanical Applications |
| | D. Kaden, S. Gu-Stoppel, H.-J. Quenzer, D. Kaltenbacher, B. Wagner, R. Dudde |
| | Fraunhofer Inst. Silicon Technology, DE |
| - | High accuracy dual side overlay with wet anisotropic etching for HAR MEMS. |
| | H.W. van Zeijl, K. Best, P.M. Sarro |
| | Delft University of Technology, NL |
| - | Micro Patterning of Organic Solvents on OLED Device Using EHD Inkjet Technology |
| | S.-H. Lee, X.H. Nguyen, W. Jo, H.S. Ko |
| | Sungkyunkwan University, KR |
| - | Soft X-Ray Lithography for High-Aspect Ratio Sub-Micrometer Structures |
| | J. Goettert, S. Lemke, I. Rudolph, T. Seliger, B. Loechel |
| | Louisiana State University, US |
| - | Design of a nano-mechanical beam based memory element |
| | H.K. Sahoo, A. Uppala, R. Anjur |
| | University of Pennsylvania, US |
| - | Measuring System Mass and Density of MEMS by Electronic Probing |
| | A. Chigullapalli |
| | Purdue University, US |
| - | Direct-Write Microfabrication for Enhancement of Functionality of Optical Fiber Devices |
| | H.R. Alemohammad, E. Foroozmehr, B. Cotten, E. Toyserkani |
| | University of Waterloo, CA |
| - | Fetal Movement Detection Based on MEMS Accelerometer |
| | L. Minjie, T. Yongkang, L. Yunfeng, Y. Song, D. Jingxin |
| | Tsinghua University, CN |
| - | Measuring the layer thickness of MEMS using torsional resonance |
| | N.D. Andrews, J.V. Clark |
| | Purdue University, US |
| - | Temperature and Strain Response of a Surface Acoustic Wave Sensor |
| | W.C. Wilson, G.M. Atkinson |
| | NASA Langley Research Center, US |
| - | Reversible and irreversible temperature-induced changes in exchange-biased planar Hall effect bridge (PHEB) magnetic field sensors. |
| | G. Rizzi, N.C. Lundtoft, F.W. Østerberg, M.F. Hansen |
| | Technical University of Denmark, DK |
| - | MEMS Oscillators |
| | A. Partridge |
| | SiTime, Corp., US |
| - | Sensitive detection of nonlinear nanomechanical motion using capacitive signal down-mixing for resonant NEMS-based sensors |
| | N. Kacem, M. Sworowski, S. Hentz, S. Baguet, R. Dufour |
| | FEMTO-ST, FR |
| - | Health monitoring of flexible composite plates: a MEMS-based approach |
| | S. Mariani, A. Corigliano, F. Caimmi, M. Bruggi, P. Bendiscioli, M. De Fazio |
| | Politecnico di Milano, STMicroelectronics, IT |
| - | The field self-calibration method of MEMS gyroscopes and accelerometers for Micro inertial measurement system |
| | J.L. Li, A.S. Chen, M. Du |
| | Beijing University of Aeronautics and Astronautics, CN |
| - | Application of Micro-channel Cooling to the Local Thermal Management of Detectors Electronics for Particle Physics |
| | A. Mapelli, P. Petagna, A. Pezous, P. Renaud |
| | CERN, CH |
| - | The Fabrication and Multi-Physics Simulation of a Novel Low Power Electrothermal Bimorph Actuator |
| | W-Z Lou, M-R Guo, Y-J Lv |
| | Beijing Institute of Technology, CN |
| - | Lumped Electro-Thermo-Mechanical Beam Model |
| | A. Chigullapalli |
| | Purdue University, US |
| - | Research in a Novel Integrated Chip of Safe and Initiation Control |
| | Y. Zhao, W.-Z. Lou, D.-G. Li |
| | Beijing Institute of Technology, CN |
| ISBN: | 978-1-4665-6275-2 |
| Pages: | 878 |
| Hardcopy: | $209.95 |
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