Nano Science and Technology Institute
Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

Chapter 5:

MEMS & NEMS Fabrication, Devices & Applications

-Integration Approaches of Combining Micro and Nano Technologies
 A. Rouzaud, Ph. Robert, J.-Ph. Polizzi, N. Sillon
 Léti, FR
-Novel Low Temperature Fabrication Method for Label-Free Electronic Sensing of Biomolecules in Nanofluidic Channels with Integrated Electrodes
 T. Wynne, X.T. Huang, S. Pennathur
 University of California, Santa Barbara, US
-Parallel Fabrication of Single-Walled Carbon Nanotube based Piezoresistive Pressure Sensors
 B.R. Burg, T. Helbling, C. Hierold, D. Poulikakos
 ETH Zürich, CH
-Design of a g-force meter on Si wafer, based on motor driven by photons
 J. Valenzuela, S. Mil’shtein
 University of Massachusetts, US
-AC and DC Applications of Three-Dimensional Nano-electro-mechanical-systems
 A.B. Kaul, A.R. Khan, K.G. Megerian, L. Bagge, L. Epp
 Jet Propulsion Laboratory, US
-Programmable MEMS-Based Silicon Timing Solutions Change the Game
 M. Lutz
 SiTime Corp, US
-Space Applications for Wireless Sensors
 W.C. Wilson, G.M. Atkinson
 NASA Langley Research Center, US
-Design and Fabrication of a Multi-Axis MEMS Force Sensor with Integrated Carbon Nanotube Based Piezoresistors
 M.A. Cullinan, R.M. Panas, M.L. Culpepper
 Massachusetts Institute of Technology, US
-Tin oxide nanowire sensors for highly sensitive detection of toxic gases
 A. Koeck, E. Brunet, C. Griessler, T. Maier, G. Mutinati, S. Steinhauer
 AIT Austrian Institute of Technology GmbH, AT
-Design, Fabrication and Characterization of Inverse Adiabatic Fiber-To-Chip Couplers
 M. Araghchini, A. Khilo, C.W. Holzwarth, M.S. Dahlem, H.I. Smith, E.P. Ippen, F.X. Kärtner
 Massachusetts Institute of Technology, US
-Lead Frame Package of MEMS Devices using Wafer-level, Air-gap Structures
 N. Fritz, R. Saha, S.A. Bidstrup Allen, P.A. Kohl
 Georgia Institute of Technology, US
-Fracture-induced polymeric grating structures
 C.C. Lin, F. Yang, J.W. Chin, L. Sung, S. Lee
 National Tsing Hua Univesity, TW
-Comparaison between PDMS and PMMA for MEMS applications
 C. Benachaiba, M. Bouanini
 university of bechar, DZ
-High-aspect-ratio deep Si etching of micro/nano scale features with SF6 /H2/ O2 plasma, in a low plasma density reactive ion etching system
 Z. Sanaee, M. Poudineh, M. Mehran, S. Mohajerzadeh
 University of Tehran, IR
-Modularity in the Design and Volume Production of Microfluidic Devices
 J. Podczerviensky, L. Levine
 ALine, Inc., US
-An Improved Micro Injection Molding Technique for Grating Devices
 H.S. Li, W.H. Hsieh, L.K.C. Au, K.C. Liu
 National Chung Cheng University, TW
-Fabrication of Nano-structures of NiTi Shape Memory Films and Investigations on Size dependence of their Mechanical Properties
 S.K. Sharma, S. Mohan
 Indian Institute of Science, Bangalore, IN
-Multi-purpose tool for checking the microfabrication products
 G. De Pasquale, A. Somà
 Politecnico di Torino, IT
-Fabrication and analysis of MEMS test structures for residual stress measurement
 A. Sharma, M. Kaur, D. Bansal, D. Kumar, K. Rangra
 Central Electronics Engineering Research Institute (CEERI/ CSIR), IN
-SC Cavities Fast Tuning System Based on Piezoelectric Actuators
 K. Przygoda, T. Pozniak, A. Napieralski, P. Sekalski, M. Grecki
 Technical University of Lodz, PL
-Design and Fabrication of a Metallic MEMS Gripper Using Electro-Thermal V-Shape and Modified U-Shape Actuators
 J.J. Khazaai, H. Qu, M. Shillor, L. Smith
 Oakland University, US
-A Pressure Sensor Array with Sensing Ragnes Tunable by Drving Frequency
 Y.-T. Lai, Y.-J. Yang
 National Taiwan University, TW
-Control of MEMS-Technology Axial Topology MicroServos
 S.E. Lyshevski
 Rochester Institute of Technology, US
-High Sensitivity Dielectric Filled Lamé Mode Resonator for Chemical and Biological Applications
 A. Heidari, YJ. Yoon, WT. Park, J.T.M. Lin
 Nanyang Technological University, SG
-Comparison of Electrical performance of Symmetric Toggle Switch with different dielectric layers
 K. Maninder
 Central Electronics Engineering Research Institute, IN
-Reconfigurable RF Front End Section of Mobile
 P. Chawla, N. Saluja, K. Chawla, N. Gupta, A. Chhikara, K. Kaur, S.K. Suman
 KITM,kurukshetra, IN
-Gravimeter on a Chip: A Theoretical Study
 F. Li, J.V. Clark
 Purdue University, US
-A simple and low cost method for fabrication of nanochannels using water soluble nanowires
 A. Joshi
 Agharkar Research Institute, IN
-A Novel Silicon-based Wideband Nano Switch for RF Applications
 Y.X. Yang, R. Ramer
 University of New South Wales (UNSW), AU
-Meander based RF MEMS capacitive switch for Mobile Front End Terminal Antenna support
 P. Chawla, R. Khanna
 KITM, Kurukshetra University Kurukshetra, IN
-Design and Analysis of FBAR switches for RF Front-End Mobile Terminal
 P. Chawla, R. Khanna
 kurukshetra institute of technology and management, IN
-Weak Magnetic Fields Sensing Using Soft Ferrite Nanoparticles and MEMS
 S.E. Lyshevski
 Rochester Institute of Technology, US
-Low-cost Thin-film Transistor-based Microcantilever for Measuring Deflection
 P-Y Lin, Y-J Cheng, S. Kuan, and L-S. Huang
 National Tainwan University, TW
-Design and Characterization of a Fully Differential Mems Accelerometer Fabricated Using METALMUMPS Technology
 P. Qu
 Oakland University, US
-Calibrating the AFM with Self-Calibratable MEMS: A Theoretical Study
 F. Li, J.V. Clark
 Purdue University, US
-Comb Finger Capacitive Micro Wind Senor
 Z. Zhao, Y. Han, L. Du, Z. Fang, X. Wang
 Institute of Electronics,CAS, CN
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