MEMS & NEMS Devices

	Nanotech 2010 Vol. 2 Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational Chapter 6: MEMS & NEMS Devices
-	Micromachined Glass-Blown 3-D Spherical Shells as Mechanical Vibratory Elements
	I.P. Prikhodko, A.A. Trusov, S.A. Zotov, A.M. Shkel
	University of California, Irvine, US
-	Carbon-based Nanoelectronic Devices for Space Applicatoins
	A.B. Kaul, A.R. Khan, K.G. Megerian, P. von Allmen, L. Bagge, L. Epp, R.L. Baron
	Jet Propulsion Laboratory, US
-	Modeling of a Surface Acoustic Wave Strain Sensor
	W.C. Wilson, G.M. Atkinson
	NASA Langley Research Center, US
-	Frequency-Interleaved MEMS Ultrasound Transducer
	S-J Chen, Y. Choe, E.S. Kim
	University of Southern California, US
-	High Fidelit Loud Microspeaker Based on PZT Bimorph Diaphragm
	Y. Choe, S.J. Chen, E.S. Kim
	University of Southern California, US
-	Mechanical Robustness of FPA in a-Si Microbolometer with Fine Pitch
	H.Y. Kim, K.M. Kim, B.I. Kim, W.S. Jang, T.H. Kim, T.Y. Kang
	National Nanofab Center, KR
-	Arrayed, Piezoelectrically-Actuated Mirrors and Gratings for Spectrometer
	S-J Chen, D. Chi, J. Lo, E.S. Kim
	University of Southern California, US
-	A MEMS-Based Wide-Band Multi-State Power Attenuator for Radio Frequency and Microwave Applications
	J. Iannacci, A. Faes, F. Mastri, D. Masotti, V. Rizzoli
	Fondazione Bruno Kessler - FBK, IT
-	Design of compact, high capacitance ratio MEMS switch for X - Band applications using high-k dielectric materials
	K. Maninder
	CEERI, IN
-	One-chip MOS Structure for Temperature Flow Sensor
	M. Husak, A. Boura, J. Jakovenko
	Czech Technical University in Prague, CZ
-	Gentle Micropump based on Microelectromagnetic Actuator
	A.T. Al-Halhouli, A. Waldschik, M.I. Kilani, S. Büttgenbach
	Technische Universität Braunschweig, DE
-	Investigation of Stress in AlN Thin Films for Piezoelectric MEMS
	R.E. Sah, L. Kirste, M. Baeumler, P. Hiesinger, V. Cimalla, V. Lebedev, H. Baumann
	Fraunhofer Institute for Applied Solid State Physics, DE
-	Preparation of functional PZT films on 6” and 8” silicon wafers by high rate sputtering
	R. Dudde, D. Kaden, H.-J. Quenzer, B. Wagner
	Fraunhofer ISIT, DE
-	Design and Control of a Zero Voltage Switching MEMS DC-DC Power Converter
	S. Ghandour, G. Despesse, S. Basrour
	CEA/LETI, FR
-	A current controlled plasma-on-a-chip for atmospheric plasma generation
	H. Park, J. Jeong, Y. Kim
	Hongik University, KR
-	Development of Surface-micromachined Binary Logic Gate for Low Frequncy Signal Processing in MEMS based Sensor Applications
	S. Chakraborty, T.K. Bhattacharyya
	Indian Institute of Technology (IIT), Kharagpur, IN
-	Using MEMS as Self-Calibrating Force-Displacement Transducers: A Computational Study
	J.V. Clark, F. Li, H. Lee, K. Kadasia
	Purdue University, US
-	Towards Microrobots with Insect-Like Dexterity
	J.V. Clark, F. Li, J.V. Clark
	Purdue University, US
-	Nanolab System for Nanoelectronics and Sensors
	A. Dimonte, D. Demarchi, P. Civera, G. Piccinini
	Politecnico di Torino, IT
-	Triaxial Accelerometer for Placement Inside the Ear Canal
	T. Kwa, G. Pender, J. Letterneau
	Endevco Corporation, Meggitt Sensing Systems, US
-	Individually addressable Cantilever Arrays for Parallel Atomic Force Microscopy
	T. Sulzbach, W. Engl, R. Maier
	Nanoworld Services GmbH, DE
-	Flexible Micropost Arrays For Studying Traction Forces Of Vascular Smooth Muscle Cells
	Q. Cheng, Z. Sun, G.A. Meininger, M. Almasri
	University of Missouri, US
-	A Fully Symmetric and Completly Decoupled MEMS-SOI Gyroscope
	A. Sharaf, S. Sedky, M. Serry, A. Elshurafa, M. Ashour, S.E.-D. Habib
	American University in Cairo, EG
-	Nano-porous poly-silicon gated ion selective field effect transistors
	N. Zehfroosh, M. Shahmohammdi, S. Mohajerzadeh
	University of Tehran, IR
-	Design and Fabrication of the Sensor for Measuring the Human Bladder Volume
	S. Lee, S. Jun, S. Kim, S. Kim, B. Choi
	Sogang University, KR
ISBN:	978-1-4398-3402-2
Pages:	862
Hardcopy:	$189.95

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