Nano Science and Technology Institute
Nanotech 2010 Vol. 2
Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

Chapter 6:

MEMS & NEMS Devices

-Micromachined Glass-Blown 3-D Spherical Shells as Mechanical Vibratory Elements
 I.P. Prikhodko, A.A. Trusov, S.A. Zotov, A.M. Shkel
 University of California, Irvine, US
-Carbon-based Nanoelectronic Devices for Space Applicatoins
 A.B. Kaul, A.R. Khan, K.G. Megerian, P. von Allmen, L. Bagge, L. Epp, R.L. Baron
 Jet Propulsion Laboratory, US
-Modeling of a Surface Acoustic Wave Strain Sensor
 W.C. Wilson, G.M. Atkinson
 NASA Langley Research Center, US
-Frequency-Interleaved MEMS Ultrasound Transducer
 S-J Chen, Y. Choe, E.S. Kim
 University of Southern California, US
-High Fidelit Loud Microspeaker Based on PZT Bimorph Diaphragm
 Y. Choe, S.J. Chen, E.S. Kim
 University of Southern California, US
-Mechanical Robustness of FPA in a-Si Microbolometer with Fine Pitch
 H.Y. Kim, K.M. Kim, B.I. Kim, W.S. Jang, T.H. Kim, T.Y. Kang
 National Nanofab Center, KR
-Arrayed, Piezoelectrically-Actuated Mirrors and Gratings for Spectrometer
 S-J Chen, D. Chi, J. Lo, E.S. Kim
 University of Southern California, US
-A MEMS-Based Wide-Band Multi-State Power Attenuator for Radio Frequency and Microwave Applications
 J. Iannacci, A. Faes, F. Mastri, D. Masotti, V. Rizzoli
 Fondazione Bruno Kessler - FBK, IT
-Design of compact, high capacitance ratio MEMS switch for X - Band applications using high-k dielectric materials
 K. Maninder
 CEERI, IN
-One-chip MOS Structure for Temperature Flow Sensor
 M. Husak, A. Boura, J. Jakovenko
 Czech Technical University in Prague, CZ
-Gentle Micropump based on Microelectromagnetic Actuator
 A.T. Al-Halhouli, A. Waldschik, M.I. Kilani, S. Büttgenbach
 Technische Universität Braunschweig, DE
-Investigation of Stress in AlN Thin Films for Piezoelectric MEMS
 R.E. Sah, L. Kirste, M. Baeumler, P. Hiesinger, V. Cimalla, V. Lebedev, H. Baumann
 Fraunhofer Institute for Applied Solid State Physics, DE
-Preparation of functional PZT films on 6” and 8” silicon wafers by high rate sputtering
 R. Dudde, D. Kaden, H.-J. Quenzer, B. Wagner
 Fraunhofer ISIT, DE
-Design and Control of a Zero Voltage Switching MEMS DC-DC Power Converter
 S. Ghandour, G. Despesse, S. Basrour
 CEA/LETI, FR
-A current controlled plasma-on-a-chip for atmospheric plasma generation
 H. Park, J. Jeong, Y. Kim
 Hongik University, KR
-Development of Surface-micromachined Binary Logic Gate for Low Frequncy Signal Processing in MEMS based Sensor Applications
 S. Chakraborty, T.K. Bhattacharyya
 Indian Institute of Technology (IIT), Kharagpur, IN
-Using MEMS as Self-Calibrating Force-Displacement Transducers: A Computational Study
 J.V. Clark, F. Li, H. Lee, K. Kadasia
 Purdue University, US
-Towards Microrobots with Insect-Like Dexterity
 J.V. Clark, F. Li, J.V. Clark
 Purdue University, US
-Nanolab System for Nanoelectronics and Sensors
 A. Dimonte, D. Demarchi, P. Civera, G. Piccinini
 Politecnico di Torino, IT
-Triaxial Accelerometer for Placement Inside the Ear Canal
 T. Kwa, G. Pender, J. Letterneau
 Endevco Corporation, Meggitt Sensing Systems, US
-Individually addressable Cantilever Arrays for Parallel Atomic Force Microscopy
 T. Sulzbach, W. Engl, R. Maier
 Nanoworld Services GmbH, DE
-Flexible Micropost Arrays For Studying Traction Forces Of Vascular Smooth Muscle Cells
 Q. Cheng, Z. Sun, G.A. Meininger, M. Almasri
 University of Missouri, US
-A Fully Symmetric and Completly Decoupled MEMS-SOI Gyroscope
 A. Sharaf, S. Sedky, M. Serry, A. Elshurafa, M. Ashour, S.E.-D. Habib
 American University in Cairo, EG
-Nano-porous poly-silicon gated ion selective field effect transistors
 N. Zehfroosh, M. Shahmohammdi, S. Mohajerzadeh
 University of Tehran, IR
-Design and Fabrication of the Sensor for Measuring the Human Bladder Volume
 S. Lee, S. Jun, S. Kim, S. Kim, B. Choi
 Sogang University, KR
ISBN:978-1-4398-3402-2
Pages:862
Hardcopy:$189.95
 
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