Authors: H. Najafi, A. Karimi, M. Morstein, H. Najafi
Affilation: École Polytechnique Fédérale de Lausanne, Switzerland
Pages: 631 - 634
Keywords: oxynitride, pulsed DC sputtering, nanoindentation
Due to their good mechanical properties as well as high temperature oxidation resistance, multi element oxynitride thin films have attracted more attention for applications in cutting and forming tools. Nanocomposite coatings represent a new generation of materials. They are composed of at least two separated phases with a nanocrystalline and/or amorphous structure and New unique physical and functional properties of the nanocomposite coatings are a main driving force stimulating the development of these materials.