Authors: U. Sharma, D. Susnitzky
Affilation: Evans Analytical Group, United States
Pages: 393 - 396
Keywords: TEM, microelectronics, nanoparticles, STEM, EELS, EDS
This article reviews applications of analytical transmission electron microscopy (TEM) to characterize nano-structured materials and devices. Several practical examples are provided that show the diverse imaging and microanalysis mechanisms available in a modern TEM. By leveraging the right imaging technique, TEM can reveal the properties of materials at the nanometer scale. For this study, samples were prepared by standard preparation methods involving FIB milling (FEI Altura 835) or mechanical polishing followed by Ar+ ion milling or by dispersing nanoparticles on carbon support films. TEM characterization was performed on a FEI Tecnai TF-20XT FEGTEM with 30mm2 INCA EDX detector and GATAN ENFINA PEELS system. Application examples in the field of microelectronics, optoelectronics and nanoparticles are included.