Liao B.T., Yang Y-J
National Taiwan University, TW
Keywords: bi-stable, KOH etching, MEMS, optical switch
In this paper, the design and fabrication of a 4×4 hybrid optical switch, which is composed of a MEMS-based silicon micro-mirror array and a mini-actuator array, is presented. The silicon micro-mirror-array structure, which includes vertical mirrors, cantilevers, and trenches for passing light beams, are realized by using simple KOH etching process. The mini-actuator array consists of commercially-available electromagnetic bi-stable mini-relays. The main advantages of this proposed design include high precision, easy for fiber alignment, high fabrication yield as well as low cost. The design and the fabrication process will be described. Also, the preliminary measured results will be provided.
Journal: TechConnect Briefs
Volume: 3, Nanotechnology 2008: Microsystems, Photonics, Sensors, Fluidics, Modeling, and Simulation – Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: June 1, 2008
Pages: 474 - 477
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 978-1-4200-8505-1