Nano Science and Technology Institute
Nanotech 2008 Vol. 3
Nanotech 2008 Vol. 3
Nanotechnology 2008: Microsystems, Photonics, Sensors, Fluidics, Modeling, and Simulation - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 3

Chapter 2:

Sensors & Systems

-Silicon on ceramics - a new concept for micro-nano-integration on wafer level
 M. Fischer, H. Bartsch de Torres, B. Pawlowski, M. Mach, R. Gade, S. Barth, M. Hoffmann, J. Müller
 Technische Universität Ilmenau, DE
-Micro to Nano – Scaling Packaging Technologies for Future Microsystems
 T. Braun, K.-F. Becker, J. Bauer, F. Hausel, B. Pahl, O. Wittler, R. Mrossko, E. Jung, A. Ostmann, M. Koch, V. Bader, C. Minge, R. Aschenbrenner, H. Reichl
 Technical University Berlin, DE
-Contact-free Handling of Metallic Submicron and Nanowires for Microelectronic Packaging Applications
 S. Fiedler, M. Zwanzig, M.S. Jäger, M. Böttcher
 Fraunhofer Institute for Reliability and Microintegration, DE
-MEMS Pressure Sensor Array for Aeroacoustic Analysis of the Turbulent Boundary Layer on an Airplane Fuselage
 J.S. Krause, R.D. White, M.J. Moeller, J.M. Gallman, R. De Jong
 Tufts University, US
-Building Micro-Robots: A path to sub-mm3 autonomous systems
 J.R. Reid, V. Vasilyev, R.T. Webster
 US Air Force Research Laboratory, US
-Pressure sensor data processing for vertical velocity measurement
 M. Husak, J. Jakovenko, L. Stanislav
 Czech Technical University in Prague, CZ
-Adaptive Subband Filtering Method for MEMS Accelerometer Noise Reduction
 P. Pietrzak, B. Pekoslawski, M. Makowski, A. Napieralski
 Technical University of Lodz, PL
-Microsystems on their Way to Smart Systems
 L. Heinze
 VDI/VDE Innovation + Technik GmbH, DE
-A 20 µm Movable Micro Mobile
 J. Jeon, J.-B. Lee, M.J. Kim
 The University of Texas at Dallas, US
-Development of Active Systems for Military Utilization
 J.L. Zunino III., H.C. Lim
-Sensing Weak Magnetic Field By Leaving Biosystems and A Magnetoreseption Mechanism For Navigation
 S.E. Lyshevski
 Rochester Institute of Technology, US
-Design and Microfabrication of an Electrostatically Actuated Scanning Micromirror with Elevated Electrodes
 M. Haris, H. Qu, A. Jain, H. Xie
 Oakland University, US
-Deposition of functional PZT films as actuators in MEMS devices by high rate sputtering
 H.-J. Quenzer, R. Dudde, H. Jacobsen, B. Wagner, H. Föll
 Fraunhofer ISIT, DE
-10GHz Surface Acoustic Wave Filter Fabrication by UV Nano-Imprint
 N-H Chen, H.J.H. Chen, C-H Lin, F-S Huang
 National Tsing Hua University, TW
-Nano-gap high quality factor thin film SOI MEM resonators
 D. Grogg, C.H. Tekin, D.N. Badila-Ciressan, D. Tsamados, M. Mazza, M.A. Ionescu
 Ecole Polytechnique Fédérale de Lausanne, CH
-Multiband THz detection and imaging devices
 L. Popa-Simil, I.L. Popa-Simil
-Feasibility Study of Cochlear-like Acoustic Sensor using PMN-PT Single Crystal Cantilever Array
 S. Hur, S.Q. Lee, W.D. Kim
 Korea Institute of Machnery & Materials, KR
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