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 | Nanotech 2007 Vol. 4
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 4
Chapter 3: Nanofabrication |
| | Nanostructuration of sol-gel thin films | | Authors: | C. Peroz, V. Goletto, M. Foresti, C. Heitz, L. Le Gratiet, E. Barthel and E. Sondergard | | Affilation: | Laboratoire mixte CNRS/Saint-Gobain, FR | | Pages: | 450 - 452 | | Keywords: | nanoimprint, sol-gel | | Abstract: | Sol-gel chemistry is very versatile and structuring sol-gel materials will allow a fine tuning of chemistry, electromagnetic, optical and mechanical properties. We explore the possibilities to combine sol-gel chemistry to large scale patterning at low cost and high throughput. We demonstrate here the feasibility to fabricate organic-inorganic silica patterns over large areas with a resolution lower than 500nm by soft thermal nanoimprint lithography. | | ISBN: | 1-4200-6376-6 |
| Pages: | 768 |
| Hardcopy: | $199.99 |
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