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 | Nanotech 2007 Vol. 3
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 1: MEMS/NEMS |
| | Piezoresistive effect in DLC Films and Silicon | | Authors: | A. Tibrewala, A. Phataralaoha, E. Peiner, R. Bandorf and S. Büttgenbach | | Affilation: | TU Braunschweig, DE | | Pages: | 17 - 20 | | Keywords: | DLC, boss membrane, CMM, p-diffused silicon | | Abstract: | In this work piezoresistive effect in Diamond-like carbon (DLC) films and p-diffused strain gauges is compared for the first time. DLC films are already well known in optical coatings. Here it is integrated with silicon in a MEMS test structure and shows a high gauge factor value which will make DLC films popular in MEMS. p-diffused strain gauges are presented for comparision. Both the materials shows a promise as force sensors which can be used in 3D coordinate measuring machine. | | ISBN: | 1-4200-6184-4 |
| Pages: | 732 |
| Hardcopy: | $199.99 |
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