Authors: O.H. Elibol, B. Reddy_Jr. and R. Bashir
Affilation: Purdue University, United States
Pages: 198 - 201
Keywords: field effect, biosensors, biomolecules, selective functionaliztion, nanoplate
We propose a novel scheme for the en masse fabrication and selective functionalization of field effect silicon nanoplate devices to enable the ultrasensitive, simultaneous and label-free detection of multiple biomolecular species in real time. The demonstrated top down fabrication process allows for mass fabrication and integration of the nanoplate devices as highly dense arrays of fully functional biosensors. We detail the characterization of several resistive heating experiments using these devices to show that selective heating of individual devices can be used to functionalize individual sensor elements with different biological probe molecules. This will allow for the simultaneous detection of several biological species at once, even at extremely low concentrations. These devices can be used in a wide variety of applications, including diagnostics, drug discovery, and cell signaling research.