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Nanotech 2006 Vol. 3
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Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3
Nanotech 2006 Vol. 3
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3
 
Chapter 6: MEMS Device Modeling
 

Parameterizable Library Components for SAW Devices

Authors:W.C. Wilson and G.M. Atkinson
Affilation:NASA Langley Research Center, US
Pages:570 - 573
Keywords:SAW, parametrizable library, modeling
Abstract:The lack of integrated design tools for SAW devices has led us to develop tools that in the future will enable integrated design, modeling, simulation, analysis and automatic layout generation of Surface Acoustic Wave (SAW) devices. Starting from the bottom up we found it necessary to develop a parameterizable library for the layout of SAW devices. This library is the first component in our strategy towards an integrated design tool. This library is much like the standard cell libraries found in digital design packages. We implemented the library as a layout generator in Coventor Inc.’s Designer tool. The library allows the user to input the parameters which generate detailed layouts of SAW components such as delay lines, resonators and sensors. . We created several generators for basic SAW Inter-Digitated Transducer (IDT) structures, delay lines, and resonators. We are also using the Impulse Response Modeling methods to construct models of the SAW devices.
ISBN:0-9767985-8-1
Pages:913
Hardcopy:$185.00
 
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