Nano Science and Technology Institute
Nanotech 2006 Vol. 3
Nanotech 2006 Vol. 3
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3

Chapter 6:

MEMS Device Modeling

-Mechanical Properties Measurements of 0.35-µm BiCMOS MEMS Structures
 J. Liu, G.K. Fedder, S. Sassolini and N. Sarkar
 Carnegie Mellon University, US
-MEMS Process Characterization with an on-Chip Device
 D. Garmire, H. Choo, R.S. Muller, S. Govindjee and J. Demmel
 UC Berkeley, US
-Analytic Damping Model for a Square Perforation Cell
 T. Veijola
 Helsinki University of Technology, FI
-Simulations of the Anchor Losses in MEM Disk Resonators
 D. Paci, S. Stoffels and H.A.C. Tilmans
-Adaptive Control for Reducing the Effect of Damping on the Output Signal of Microgyroscopes
 R. Khalilyulin, T. Hauck and G. Wachutka
 Munich University of Technology, DE
-Microcantilever Sensor via Second Order Sliding Mode Control
 J. English, Y. Shtessel, M. Yegnaraman and M. George
 University of Alabama in Huntsville, US
-Parameterizable Library Components for SAW Devices
 W.C. Wilson and G.M. Atkinson
 NASA Langley Research Center, US
-Strong and Weak Inversion Mode of MOS in the Design of Direction Sensitivity Matrix
 M. Husak, A. Boura and J. Jakovenko
 Czech Technical University in Prague, CZ
-Manipulation of Capillary force by Electrowetting for Micromanipulation
 S. Chandra and C. Batur
 University of Akron, US
-Multiphysics Modeling and Simulation for a MEMS Thermal-Mechanical Switch
 W. Wang, R. Popuri, S. Onishi, J. Bumgarner and L. Langebrake
 University of South Florida, US
-Smart Pressure Sensor on SOI optimized by Finite Element Analysis for Heatspreader Integration
 B. Bercu, L. Montès and P. Morfouli
-Modelling of Torsional Micromirrors with Springs made of Multiple Rotational Serpentine Elements
 J. You, M. Packirisamy and I. Stiharu
 Concordia University, CA
-Application of a Design Methodology Using a 2D Micro Scanner
 O. Anac and I. Basdogan
 Koc University, TR
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