 | Nanotech 2006 Vol. 3
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 6: MEMS Device Modeling |
| - | Mechanical Properties Measurements of 0.35-µm BiCMOS MEMS Structures |
| | J. Liu, G.K. Fedder, S. Sassolini and N. Sarkar |
| | Carnegie Mellon University, US |
| - | MEMS Process Characterization with an on-Chip Device |
| | D. Garmire, H. Choo, R.S. Muller, S. Govindjee and J. Demmel |
| | UC Berkeley, US |
| - | Analytic Damping Model for a Square Perforation Cell |
| | T. Veijola |
| | Helsinki University of Technology, FI |
| - | Simulations of the Anchor Losses in MEM Disk Resonators |
| | D. Paci, S. Stoffels and H.A.C. Tilmans |
| | IMEC, BE |
| - | Adaptive Control for Reducing the Effect of Damping on the Output Signal of Microgyroscopes |
| | R. Khalilyulin, T. Hauck and G. Wachutka |
| | Munich University of Technology, DE |
| - | Microcantilever Sensor via Second Order Sliding Mode Control |
| | J. English, Y. Shtessel, M. Yegnaraman and M. George |
| | University of Alabama in Huntsville, US |
| - | Parameterizable Library Components for SAW Devices |
| | W.C. Wilson and G.M. Atkinson |
| | NASA Langley Research Center, US |
| - | Strong and Weak Inversion Mode of MOS in the Design of Direction Sensitivity Matrix |
| | M. Husak, A. Boura and J. Jakovenko |
| | Czech Technical University in Prague, CZ |
| - | Manipulation of Capillary force by Electrowetting for Micromanipulation |
| | S. Chandra and C. Batur |
| | University of Akron, US |
| - | Multiphysics Modeling and Simulation for a MEMS Thermal-Mechanical Switch |
| | W. Wang, R. Popuri, S. Onishi, J. Bumgarner and L. Langebrake |
| | University of South Florida, US |
| - | Smart Pressure Sensor on SOI optimized by Finite Element Analysis for Heatspreader Integration |
| | B. Bercu, L. Montès and P. Morfouli |
| | INPG-MINATEC, FR |
| - | Modelling of Torsional Micromirrors with Springs made of Multiple Rotational Serpentine Elements |
| | J. You, M. Packirisamy and I. Stiharu |
| | Concordia University, CA |
| - | Application of a Design Methodology Using a 2D Micro Scanner |
| | O. Anac and I. Basdogan |
| | Koc University, TR |
| ISBN: | 0-9767985-8-1 |
| Pages: | 913 |
| Hardcopy: | $185.00 |
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| Order: | Mail/Fax Form |
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