Authors: S. Stoffels, L.J. Fernández, R. Puers and H.A.C. Tilmans
Affilation: IMEC, Belgium
Pages: 499 - 502
Keywords: Casimir, resonators, MEMS
Nowadays, electrostatically driven high frequency micromechanical resonators are being developed in which the gap spacing is minimized in order to achieve sufficiently high electromechanical coupling. Typical gap spacings for resonators operated close to a GHz are in the order of 80-100 nm . In this region the so called Casimir force, that until now has been neglected, may become relevant. The Casimir force is of quantum mechanical origin and is exerted between two conductive surfaces ; the magnitude of this force scales with the separation distance between the surfaces and has an inverse quartic dependency. In this work we investigate the influence of the Casimir force on both the static and dynamic parameters of MEM resonators.