Sensitivity to Shape and Membrane Thickness Variations in Capacitive Pressure Sensors

Sabet A., Avula X.J.
Washington University in St. Louis, US

Keywords: membrane, pressure, sensor

capacitive pressure sensor, membrane thickness, membrane shape, sensitivity

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Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 7, 2006
Pages: 385 - 388
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9767985-8-1