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 | Nanotech 2006 Vol. 3
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 2: Nanoscale Fabrication |
| | Production of Nanodots by Ion Sputtering on Mechanical Polished (110) Si-Substrates | | Authors: | C. Ballesteros, A. Rodríguez and T. Rodríguez | | Affilation: | Universidad Carlos III de Madrid, ES | | Pages: | 174 - 177 | | Keywords: | nanodots, ion sputtering, TEM | | Abstract: | We report a new method to deposit Cu nanocrystals by 5kV Ar+ ion sputtering of Cu metallic ribbons at glazing incidence, 8º, on top of (110) Si-substrates mechanical polished down to a 0.1 μm finish. The Si- substrate was placed into a rotating specimen holder at the same plane that the Cu ribbons and was maintained at liquid nitrogen temperature in an oil-free vacuum of 2x10-4 torr. The used glazing incidence of the Ar+ ions magnified the sputtering yield and the surface scratches induced by the mechanical polishing favoured the formation of a quasi-ordered array of nanodots. | | ISBN: | 0-9767985-8-1 |
| Pages: | 913 |
| Hardcopy: | $185.00 |
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