Novel PDMS stamp for imprint lithography

	Nanotech 2006 Vol. 3 Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3 Chapter 2: Nanoscale Fabrication
	Novel PDMS stamp for imprint lithography
Authors:	I.S. Maeng
Affilation:	Samsung Electro-mechanics Co. Ltd., KR
Pages:	270 - 272
Keywords:	PDMS, imprinting lithography, mechanica strength, stamp
Abstract:	New PDMS/epoxy composite material which has sufficent mechanical strength is used as a stamp for the imprinting lithography. Its fabrication procedure, and the imprinting results using this stamp will be discussed.
ISBN:	0-9767985-8-1
Pages:	913
Hardcopy:	$185.00

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