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 | Nanotech 2006 Vol. 1
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 1
Chapter 8: Characterization |
| | Laser Postionization Secondary Neutral Mass Spectrometry for Analysis on the Nanometer-Scale | | Authors: | I.V. Veryovkin, W.F. Calaway, C.E. Tripa and M.J. Pellin | | Affilation: | Argonne National Laboratory, US | | Pages: | 733 - 736 | | Keywords: | mass spectrometry, laser postionization, ion sputtering, laser desorption | | Abstract: | A new time-of-flight mass spectometer of postionized secondary neutrals, SARISA, has been developed and constructed at Argonne National Laboratory. This advanced analytical instrument has uniquely high useful yield >20%, is equipped with high spatial resolution microprobes (ion, electron and laser) that are combined with low energy ion sputtering for high depth resolution. This makes the instrument capable of three-dimensional characterization of samples with nanometer dimensions. | | ISBN: | 0-9767985-6-5 |
| Pages: | 871 |
| Hardcopy: | $185.00 |
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