Zhang L., Dong L.X., Bell D.J., Nelson B.J., Schönenberger C., Grützmacher D.
Paul Scherrer Institut, CH
Keywords: Euler buckling, semiconductor nanotube, SiGe
Freestanding Si/SiGe microtubes have been fabricated using the roll-up technique of strained bilayer structures. Si/SiGe bilayers of 18 nm thickness have been rolled into tubes of 1.3 μm diameter. Tubes of 60 μm length have been detached from the substrate and placed between a nanorobotic manipulaltor and an AFM tip to analyse their mechanical properties using the Euler buckling method. The tubes proved to be mechanical robust with a flexural rigidity (EI) amounting to 4.1*10-15 Nm2. The presented manipulation technique has been proven to be a suitable approach to characterize the mechanical properties of these self-scrolled semiconductor structures. The results give insights into the suitability of these structures for micromechanical devices.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: May 7, 2006
Pages: 42 - 45
Industry sector: Advanced Materials & Manufacturing
Topic: Nanoelectronics
ISBN: 0-9767985-6-5