| |
 | Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 9: MEMS Modeling and Design |
| | Stress Optimization of a Micromechanical Torsional Spring | | Authors: | T. Klose, D. Kunze, T. Sandner, H. Schenk, H. Lakner, A. Schneider and P. Schneider | | Affilation: | Fraunhofer IPMS, DE | | Pages: | 602 - 605 | | Keywords: | MEMS, ANSYS, MOSCITO, optimization, torsional spring | | Abstract: | In this paper we present a method for the design of a stress-optimized, micromechanical torsional spring, used in MEMS. Our optimization approach is based on a software tool for simulator-based optimization MOSCITO, cooperating with the FEM tool ANSYS. For a specific spring geometry we are able to increase maximally possible deflection by approximately 30 percent. | | ISBN: | 0-9767985-2-2 |
| Pages: | 786 |
| Hardcopy: | $165.00 |
|
| Order: | Mail/Fax Form |
| Special: | 3 CD Set — 15% off with Free Shipping |
| Up | |
|
| nanoPRwire™ |
 |
| News Headlines |
 |
|
|
| |
| |
|
| | |
| |
|
|
