Authors: M. Marzencki, S. Basrour and B. Charlot
Affilation: TIMA, France
Pages: 545 - 548
Keywords: micro power generators, piezoelectric conversion
This paper presents a mechanical vibration energy scavenging solution for micro power generation. The transduction is performed using a novel resonant cantilever beam SOI structure with a piezoelectric film. Simulation and optimization of such a device fabricated using a specific MEMS process and with piezoelectric thin film is detailed. The simulation results will be compared with experimental data obtained using devices currently under fabrication.