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 | Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 9: MEMS Modeling and Design |
| | Design, Modelling and Optimisation of Integrated Piezoelectric Micro Power Generators | | Authors: | M. Marzencki, S. Basrour and B. Charlot | | Affilation: | TIMA, FR | | Pages: | 545 - 548 | | Keywords: | micro power generators, piezoelectric conversion | | Abstract: | This paper presents a mechanical vibration energy scavenging solution for micro power generation. The transduction is performed using a novel resonant cantilever beam SOI structure with a piezoelectric film. Simulation and optimization of such a device fabricated using a specific MEMS process and with piezoelectric thin film is detailed. The simulation results will be compared with experimental data obtained using devices currently under fabrication. | | ISBN: | 0-9767985-2-2 |
| Pages: | 786 |
| Hardcopy: | $165.00 |
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