Authors: C. Hierold
Affilation: ETH Zürich, Switzerland
Pages: 467 - 470
Keywords: microsystem, MEMS, nanosystem, carbon nano tube, sensor
This paper is about the impact of scaling on the system performance of mechanical inertia sensors and first activities towards nano mechanical sensors. Permanent cost pressure will result in continuous efforts to integrate more functions into further miniaturized systems. As a consequence microsystems (MEMS) may also incorporate functional nano devices such as carbon nanotubes in the future. Therefore an overview of recent activities for the application of carbon nanotubes with a focus on mechanical sensors is provided.