MEMS/NEMS Design and Applications

	Nanotech 2005 Vol. 3 Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3 Chapter 8: MEMS/NEMS Design and Applications
-	A Novel Approach to Integrate Multiple Frequencies of Film Bulk Acoustic Resonators (FBAR) In A Single Chip
	Z. Huang, Z. Suo, L.-P. Wang, D. Shim and Q. Ma
	Intel Corporation, US
-	Biologically Functionalized Nanochannels on Ferroelectric Lead Zirconium Titanate Surfaces
	L.E. Ocola, W.C. Pan, M. Kuo, V.R. Tirumala, B.D. Reiss, M.A. Firestone and O. Auciello
	Argonne National Laboratory, US
-	Automated and Integrated Mask Genertion from a CAD Constructed 3D Model
	R.L. Schiek and R.C. Schmidt
	Sandia National Laboratories, US
-	Application of Mass Transport in Solid Electrolyte Films in Tunable Microelectromechanical Resonators
	M.N. Kozicki, C.L. Brown III, M. Mitkova, S. Enderling, J. Hedley and A.J. Walton
	Arizona State University, US
-	RF-MEMS switching LC-tank network for multiband VCO
	R. Gaddi, A. Gnudi, M. Bellei, B. Margesin and F. Giacomozzi
	ARCES - University of Bologna, IT
-	Nanoparticle Separations Using Miniaturized Field-Flow Fractionation Systems
	M. Graff, T.L. Edwards, B.K. Gale and A.B. Frazier
	Georgia Institute of Technology, US
-	Higher Order Sigma-Delta Modulator Interfaces for MEMS Capacitive Sensors
	M. Kraft and Y. Dong
	Southampton University, UK
-	MEMS Reliability Assessment ProgramMicro-electromechanical Systems (MEMS) Reliability Assessment Program for Department of Defense Activities
	J.L. Zunino III, D. Skelton and R. Mason
	U.S. Army Corrosion Office, US
-	Towards Nano Mechanical Sensors
	C. Hierold
	ETH Zürich, CH
-	Intelligent Sensors: Systems or Components?
	N. White
	Southampton University, UK
-	Y-nano X-micro Technologies: nanometric optical control
	D.W. de Lima Monteiro, F.P. Honorato, A.I. Ferreira Jr, O. Soloviev, G. Vdovin and M. Loktev
	Federal University of Minas Gerais, BR
-	The Optimisation of a Resonant Gas Sensor by Using Nano-Tectured Surfaces
	P.T. Docker, P.K. Kinnell and M.C.L. Ward
	University of Birmingham, UK
-	Control of Particles Using Multi-Frequency DEP
	S. Loire, Y. Zhang, F. Bottausci, I. Mezic, N. McDonald
	University of California Santa Barbara, US
-	Zeolite Membrane Microreactors for Fine Chemical Synthesis
	X. Zhang, S.M. Lai, K.F. Lam, K.L. Yeung and R. Martin-Aranda
	Hong Kong University of Science and Technology, CN
-	Design Optimisation of an Electrostatic MEMS Actuator with Low Spring Constant for an “Atom Chip”
	H.A. Rouabah, C.O. Gollasch and M. Kraft
	University of Southampton, UK
-	Design Optimization of a Surface Micromachined Electro-Thermal Beam Flexure Polysilicon Actuator
	A. Atre
	Georgia Institute of Technology, US
-	MEMS-Based MHz Integrated Ultrasonic Nozzles with Applications to Micro/Nano Technologies
	S.C. Tsai, Y.L. Song, Y.F. Chou, G. Qiu, E. Degiovanni, N. Wang, J.S. Cheng and C.S. Tsai
	University of California, Irvine, US
-	The Design and Simulation of a Novel Out-of-plane Micro Electrostatic Actuator
	C. Tsou, S.L. Huang, T.S. Lai and H.C. Li
	Feng Chia University, TW
-	Fabrication and Characterization of MOS Transistor Tip Integrated Micro Cantilever
	S.H. Lee, G. Lim and W. Moon
	Pohang University of Science and Technology, KR
-	Computer-Based Process Design Support for MEMS
	A. Wagener, J. Popp, T. Schmidt and K. Hahn
	University of Siegen, DE
-	Packaging Design with Thermal Analysis of LED on Silicon Substrate
	C. Tsou, Y.S. Huang, H.C. Li and T.S. Lai
	Feng Chia University, TW
-	A Tunable Dispersive Optical System
	K-W Shieh, J. Hsieh and H-Y Chou
	Precsion Instrument Development Center, TW
-	Microfabricated Heteroepitaxial Oxide Structures on Silicon for Bolometric Arrays
	J-H Kim and A.M. Grishin
	Condensed Matter Physics, Laboratory of Solid State Devices, Dept. Microelectronics and Information , SE
-	A Study on Alleviating Deformation of MEMS Structure and Prediction of Residual Stress in Surface Micromachining
	S. Kweon, S. Hong, H. Shin and B. Jeon
	Samsung Advanced Institute of Technology, KR
-	Design and Analysis of The CMOS Spatial Light Modulators with Flat Beam Profiles
	C-P Hsu, C-T Shih, S-Y Wen, Y-H Chien, C-C Hu and H-W Lee
	Industrial Technology Research Institute, TW
ISBN:	0-9767985-2-2
Pages:	786
Hardcopy:	$109.95

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