 | Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 8: MEMS/NEMS Design and Applications |
| - | A Novel Approach to Integrate Multiple Frequencies of Film Bulk Acoustic Resonators (FBAR) In A Single Chip |
| | Z. Huang, Z. Suo, L.-P. Wang, D. Shim and Q. Ma |
| | Intel Corporation, US |
| - | Biologically Functionalized Nanochannels on Ferroelectric Lead Zirconium Titanate Surfaces |
| | L.E. Ocola, W.C. Pan, M. Kuo, V.R. Tirumala, B.D. Reiss, M.A. Firestone and O. Auciello |
| | Argonne National Laboratory, US |
| - | Automated and Integrated Mask Genertion from a CAD Constructed 3D Model |
| | R.L. Schiek and R.C. Schmidt |
| | Sandia National Laboratories, US |
| - | Application of Mass Transport in Solid Electrolyte Films in Tunable Microelectromechanical Resonators |
| | M.N. Kozicki, C.L. Brown III, M. Mitkova, S. Enderling, J. Hedley and A.J. Walton |
| | Arizona State University, US |
| - | RF-MEMS switching LC-tank network for multiband VCO |
| | R. Gaddi, A. Gnudi, M. Bellei, B. Margesin and F. Giacomozzi |
| | ARCES - University of Bologna, IT |
| - | Nanoparticle Separations Using Miniaturized Field-Flow Fractionation Systems |
| | M. Graff, T.L. Edwards, B.K. Gale and A.B. Frazier |
| | Georgia Institute of Technology, US |
| - | Higher Order Sigma-Delta Modulator Interfaces for MEMS Capacitive Sensors |
| | M. Kraft and Y. Dong |
| | Southampton University, UK |
| - | MEMS Reliability Assessment ProgramMicro-electromechanical Systems (MEMS) Reliability Assessment Program for Department of Defense Activities |
| | J.L. Zunino III, D. Skelton and R. Mason |
| | U.S. Army Corrosion Office, US |
| - | Towards Nano Mechanical Sensors |
| | C. Hierold |
| | ETH Zurich, CH |
| - | Intelligent Sensors: Systems or Components? |
| | N. White |
| | Southampton University, UK |
| - | Y-nano X-micro Technologies: nanometric optical control |
| | D.W. de Lima Monteiro, F.P. Honorato, A.I. Ferreira Jr, O. Soloviev, G. Vdovin and M. Loktev |
| | Federal University of Minas Gerais, BR |
| - | The Optimisation of a Resonant Gas Sensor by Using Nano-Tectured Surfaces |
| | P.T. Docker, P.K. Kinnell and M.C.L. Ward |
| | University of Birmingham, UK |
| - | Control of Particles Using Multi-Frequency DEP |
| | S. Loire, Y. Zhang, F. Bottausci, I. Mezic, N. McDonald |
| | University of California Santa Barbara, US |
| - | Zeolite Membrane Microreactors for Fine Chemical Synthesis |
| | X. Zhang, S.M. Lai, K.F. Lam, K.L. Yeung and R. Martin-Aranda |
| | Hong Kong University of Science and Technology, CN |
| - | Design Optimisation of an Electrostatic MEMS Actuator with Low Spring Constant for an “Atom Chip” |
| | H.A. Rouabah, C.O. Gollasch and M. Kraft |
| | University of Southampton, UK |
| - | Design Optimization of a Surface Micromachined Electro-Thermal Beam Flexure Polysilicon Actuator |
| | A. Atre |
| | Georgia Institute of Technology, US |
| - | MEMS-Based MHz Integrated Ultrasonic Nozzles with Applications to Micro/Nano Technologies |
| | S.C. Tsai, Y.L. Song, Y.F. Chou, G. Qiu, E. Degiovanni, N. Wang, J.S. Cheng and C.S. Tsai |
| | University of California, Irvine, US |
| - | The Design and Simulation of a Novel Out-of-plane Micro Electrostatic Actuator |
| | C. Tsou, S.L. Huang, T.S. Lai and H.C. Li |
| | Feng Chia University, TW |
| - | Fabrication and Characterization of MOS Transistor Tip Integrated Micro Cantilever |
| | S.H. Lee, G. Lim and W. Moon |
| | Pohang University of Science and Technology, KR |
| - | Computer-Based Process Design Support for MEMS |
| | A. Wagener, J. Popp, T. Schmidt and K. Hahn |
| | University of Siegen, DE |
| - | Packaging Design with Thermal Analysis of LED on Silicon Substrate |
| | C. Tsou, Y.S. Huang, H.C. Li and T.S. Lai |
| | Feng Chia University, TW |
| - | A Tunable Dispersive Optical System |
| | K-W Shieh, J. Hsieh and H-Y Chou |
| | Precsion Instrument Development Center, TW |
| - | Microfabricated Heteroepitaxial Oxide Structures on Silicon for Bolometric Arrays |
| | J-H Kim and A.M. Grishin |
| | Condensed Matter Physics, Laboratory of Solid State Devices, Dept. Microelectronics and Information, SE |
| - | A Study on Alleviating Deformation of MEMS Structure and Prediction of Residual Stress in Surface Micromachining |
| | S. Kweon, S. Hong, H. Shin and B. Jeon |
| | Samsung Advanced Institute of Technology, KR |
| - | Design and Analysis of The CMOS Spatial Light Modulators with Flat Beam Profiles |
| | C-P Hsu, C-T Shih, S-Y Wen, Y-H Chien, C-C Hu and H-W Lee |
| | Industrial Technology Research Institute, TW |
| ISBN: | 0-9767985-2-2 |
| Pages: | 786 |
| Hardcopy: | $165.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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