Markert E., Schlegel M., Dienel M., Herrmann G., Müller D.
Chemnitz University of Technology, DE
Keywords: analytic equations, modelling, rotational acceleration sensor
In this paper we present an approach for modeling and simulation of a new acceleration sensor using VHDL-AMS. The sensor consists of four capacitive segments and one mass segment, aligned in a semicircle. Each capacitive segment includes static and movable combs. Any acceleration causes a rotation and displacement of the seismic mass coupled to moveable combs. The capacity alters with these movements which is measurable. Modeling of the sensor is achieved by using analytic equations for capacity changes, currents and torques. Beside rotational movements also displacements in x- and y-direction are considered for capacity calculation. Two coordinate systems are used, one static system for the environment and one rotatable system for the sensor structure.
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 8, 2005
Pages: 399 - 402
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications, Sensors - Chemical, Physical & Bio
ISBN: 0-9767985-2-2