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Nanotech 2005 Vol. 3
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Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 7: Smart Sensors and Systems
Active Damping Control in MEMS Using Parametric Pumping
Authors:
B.J. Gallacher, J.S. Burdess, A.J. Harris and K.M. Harish
Affilation:
Newcastle University, UK
Pages:
383 - 386
Note:
This paper is not yet available for online viewing
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ISBN:
0-9767985-2-2
Pages:
786
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