Nano Science and Technology Institute
Nanotech 2005 Vol. 2
Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2

Chapter 7:

NEMS and MEMS Fabrication

-Wafer Scale Fabrication of Nano Probes for Atomic Force Microscopy
 Q.L. Ye, H. Liu, A.M. Cassell, K-J Chao and J. Han
 NASA Ames Research Center, US
-Effect of Etchant Composition and Silicon Crystal Orientation on Etch Rate
 D. Yellowaga, J. Starzynski, B. Palmer, J. McFarland and S. Drews
 Honeywell, US
-Fabrication of Complex Diffractive Structures in an Organic-Inorganic Hybrid and Incorporation of Silver Nanoparticles
 F.H. Scholes, F.L. Smith and S.A. Furman
 CSIRO Manufacturing and Infrastructure Technology, AU
-Fabrication of Nanochannels with Microfluidic Interface using PDMS Casting on Si/Ti Nanomold
 M.J. Rust, S. Subramaniam and C.H. Ahn
 University of Cincinnati, US
-Direct Patterning of Functional Materials via Atmospheric-Pressure Ion Deposition
 T.E. Hamedinger, T. Steindl, J. Albering, S. Rentenberger and R. Saf
 Graz University of Technology, AU
-A Gate Layout Technique for Area Reduction in Nano-Wire Circuit Design
 H. Hashempour and F. Lombardi
 LTX Corp., US
-Pressure Sensor Elements Integrated with CMOS
 J. Kiihamäki, T. Vehmas, T. Suni, A. Häärä, M. Ylimaula and J. Ruohio
 VTT Information Technology, FI
-Development of Self-Assembled Robust Microvalves with Electroform Fabricated Nano-Structured Nickel
 B. Li and Q. Chen
 University of Central Florida, US
-Diode Laser Welding of Planar Microfluidic Devices, BioMEMS, Diagnostic Chips & Microarrays
 J-W Chen, J. Zybko and J.T. Clements
 NanoSciences, Inc., US
-A Unified Compact Model for Electrostatic Discharge Protection Device Simulation
 H-M Chou, Y-Y Cho, J-W Lee and Y. Li
 National Chiao Tung University, TW
-Direct Wafer Polishing with 5 nm Diamond
 J.C-M Sung and M-F Tai
 Kinik Company, TW
-Fabrication of Well-aligned and Mono-modal Germanium Dots on the Silicon Substrate with Trench-ridge Nano-structures
 Y.J. Chen, Y.H. Peng, P.S. Chen and C.H. Kuan
 National Taiwan University, TW
-Application of Magnetic Neutral Loop Discharge Plasma in Deep Quartz and Silicon Etching Process for MEMS/NEMS Devices Fabrication
 Y. Morikawa, T. Hayashi, K. Suu and M. Ishikawa
 ULVAC, Inc., JP
-Microfabricated Silicon Apertures for Ion Channel Measurement
 S.J. Wilk, M. Goryll, L. Petrossian, G.M. Laws, S.M. Goodnick, T.J. Thornton, M. Saraniti, J.M. Tang and R.S. Eisenberg
 Arizona State University, US
-A Novel Method of Fabricating Optical Gratings Using the One Step DRIE Process on SOI Wafers
 A.W. Cooper, P.T. Docker and M.C. Ward
 The University of Birmingham, UK
-Absolute Pressure Measurement using 3D-MEMS Technology
 R. Russell and U. Meriheinä
 VTI Technologies, US
-Fabrication of Silicon Nanowires Using Atomic Layer Deposition
 D. Gopireddy, C.G. Takoudis, D. Gamota, J. Zhang and P.W. Brazis
 University of Illinois at Chicago, US
-Metal-oxide Nanowires for Toxic Gas Detection
 D.P. Devineni, S. Stormo, W. Kempf, J. Schenkel, R. Behanan, S. Lea and D.W. Galipeau
 South Dakota State University, US
-Microfabrication of 3D Structures Using Novel Thermoplastic Elastomers
 A.P. Sudarsan, J. Wang and V.M. Ugaz
 Texas A&M University, US
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