Nanocharacterization Using Secondary Ion Mass Spectrometry (SIMS)
Authors:
S.W. Novak and C.W. Magee
Affilation:
Evans East - Evans Analytical Group, US
Pages:
400 - 403
Keywords:
SIMS, films, copolymers
Abstract:
Secondary Ion Mass Spectrometry (SIMS) has been widely applied for depth profile analysis in the semiconductor industry, but less widely applied to characterization of other materials. Evans East has developed techniques over the last few years to bombard samples with ultra-low energy beams (
