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 | Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 4: Nano Devices and Systems |
| | RuO2 and Ru Nanoparticles for MISiC-FET Gas Sensors | | Authors: | A. Salomonsson, S. Roy, C. Aulin, L. Ojamäe, P.-O. Käll, M. Strand, M. Sanati, A. Lloyd Spetz | | Affilation: | IFM, SE | | Pages: | 269 - 272 | | Keywords: | RuO2, Ru, SiC-FET, C(V) catalytically active nanoparticles | | Abstract: | Catalytically active nanoparticles used as gate material on SiC-FET gas sensors. The goal is to improve the selsectivity and senstitivty.The sensors are sensitive towards oxidising and reducing gases (H2, NH3, C3H6). | | ISBN: | 0-9767985-1-4 |
| Pages: | 808 |
| Hardcopy: | $165.00 |
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