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 | Nanotech 2004 Vol. 3
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 4: Nano Devices and Systems |
| | A Nanoscale Electromechanical Contact Switch for Logic Applications | | Authors: | C.C. Huang and K.L. Ekinci | | Affilation: | Boston University, US | | Pages: | 187 - 189 | | Keywords: | nano-electro-mechanical systems, nano-electro-mechanical switch, mechanical logic | | Abstract: | Here, we describe the operation of a nano-electro-mechanical contact switch. The switch design relies on a sharp contact tip integrated to a compliant nanomechanical beam. When the beam is actuated electrostatically, the tip establishes intimate electrical contact between two electrodes. A preliminary contact switch was fabricated on a Si3N4 membrane using optical lithography, electron beam lithography and reactive ion etching. Its quasi-static operation was subsequently demonstrated. | | ISBN: | 0-9728422-9-2 |
| Pages: | 561 |
| Hardcopy: | $150.00 |
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