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 | Nanotech 2004 Vol. 3
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 10: Micro and Nano Structuring and Assembly |
| | Self-assembled Alternating Nano-scaled Layers | | Authors: | W-Y Wu and J-M Ting | | Affilation: | National Cheng Kung University, TW | | Pages: | 448 - 451 | | Keywords: | self-assembling, layered structures, diamond-like carbon, thin films, sputter deposition | | Abstract: | This paper reports the use of a conventional sputter deposition technique to produce self-assembled alternating nano-scaled layers consisting of diamond-like carbon (DLC) and metal. A conventional sputter deposition technique produces alternating layers only when multiple sputtering targets are employed. However, we have successfully demonstrated that the use of only one single sputtering gun in a conventional sputter deposition process could lead to the formation of alternating nano-scaled layers through self-assembling. The microstructure of the alternating layers was examined as a function of the deposition parameters. | | ISBN: | 0-9728422-9-2 |
| Pages: | 561 |
| Hardcopy: | $150.00 |
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