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 | Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 6: MEMS Modeling |
| | Piecewise Perturbation Method (PPM) Simulation of Electrostatically Actuated Beam with Uncertain Stiffness | | Authors: | J. Juillard, H. Baili and E. Colinet | | Affilation: | SUPELEC, Department of Measurement, FR | | Pages: | 283 - 286 | | Keywords: | uncertainties, simulation, perturbation | | Abstract: | We present a new approach to the simulation of uncertainties in micro-electromechanical systems, based on the same principle as perturbation methods. This approach is valid for large variations of the uncertainties and requires much less simulations than a Monte-Carlo method. An implementation in the case of an electrostatically actuated beam with uncertain stiffness is presented and compared with obtained with Monte-Carlo. | | ISBN: | 0-9728422-8-4 |
| Pages: | 519 |
| Hardcopy: | $150.00 |
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