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 | Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 6: MEMS Modeling |
| | Analytical Model for the Pull-in Time of Low-Q MEMS Devices | | Authors: | L.A. Rocha, E. Cretu and R.F. Wollfenbuttel | | Affilation: | Delft University of Technology, NL | | Pages: | 271 - 274 | | Keywords: | pull-in, MEMS dynamics, squeeze film damping, large-signal analysis | | Abstract: | A meta-stable transient region just beyond pull-in displacement that ultimately governs the pull-in time in critically damped systems is identified in this paper. Since the pull-in displacement time is basically governed by this second region (almost 90% of the pull-in time), the modeling of this region largely determines the reliability of the overall calculation of the pull-in dynamic transition. An analytical model for this region is derived and compared with measurements. The model accuracy, despite its simplicity, makes it a valuable tool for the design of MEMS switches outside vacuum and for sensors based on measuring pull-in time. | | ISBN: | 0-9728422-8-4 |
| Pages: | 519 |
| Hardcopy: | $150.00 |
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