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 | Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 6: MEMS Modeling |
| | Dynamic Simulation of an Electrostatically Actuated Impact Microactuator | | Authors: | X. Zhao, H. Dankowicz, C.K. Reddy and A.H. Nayfeh | | Affilation: | Virginia Tech, US | | Pages: | 247 - 250 | | Keywords: | microactuators, electrostatic, impact, dynamic simulation | | Abstract: | We study the dynamics of an electrostatically driven impact microactuator reported by Mita and associates. The microactuator is modeled as a two-degree-of-freedom rigid multibody system. The impact phenomenon is described by a simple impact law based on Newton’s coefficient of restitution. The system dynamics is intensively studied. We investigate the influence of various parameters including excitation frequency and voltage. | | ISBN: | 0-9728422-8-4 |
| Pages: | 519 |
| Hardcopy: | $150.00 |
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