Nano Science and Technology Institute
Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2

Chapter 6:

MEMS Modeling

-Free Surface Flow and Acousto-Elastic Interaction in Piezo Inkjet
 H. Wijshoff
 Océ Technologies B.V., NL
-Contact Force Models, including Electric Contact Deformation, for Electrostatically Actuated, Cantilever-Style, RF MEMS Switches
 R.A. Coutu_Jr. and P.E. Kladitis
 Air Force Institute of Technology, US
-Electromechanical Buckling of a Pre-Stressed Layer Bonded to an Elastic Foundation
 S. Abu-Salih and D. Elata
 Technion - Israel Institute of Technology, IL
-Three-Dimensional CFD-Simulation of a Thermal Bubble Jet Printhead
 T. Lindemann, D. Sassano, A. Bellone, R. Zengerle and P. Koltay
 University of Freiburg, DE
-Circuit Modeling and Simulation of Integrated Microfluidic Systems
 A.N. Chatterjee and N.R. Aluru
 Beckman Institute, US
-Extending the Validity of Existing Squeezed-Film Damper Models with Elongations of Surface Dimensions
 T. Veijola, A. Pursula and P. Raback
 Helsinki University of Technology, FI
-Feature Length-Scale Modeling of LPCVD and PECVD MEMS Fabrication Processes
 L.C. Musson, P. Ho, S.J. Plimpton and R.C. Schmidt
 Sandia National Laboratories, US
-Compact Models for Squeeze-Film Damping in the Slip Flow Regime
 R. Sattler and G. Wachutka
 Technical Univeristy of Münich, DE
-Dynamic Simulation of an Electrostatically Actuated Impact Microactuator
 X. Zhao, H. Dankowicz, C.K. Reddy and A.H. Nayfeh
 Virginia Tech, US
-Microplate Modeling under Coupled Structural-Fluidic-Electrostatic Forces
 M.I. Younis and A.H. Nayfeh
 Virginia Tech, US
-A Model for Thermoelastic Damping in Microplates
 A.H. Nayfeh and M.I. Younis
 Virginia Tech, US
-Design and Modeling of a 3D Micromachined Accelerometer
 S.H. Ghafari, M.F. Golnaraghi and R. Mansour
 University of Waterloo, CA
-Effect of Thermophysical Property Variations on Surface Micromachined Polysilicon Beam Flexure Actuators
 A. Atre and S. Boedo
 Rochester Institute of Technology, US
-A New 3D Model of The Electro-Mechanical Response of Piezoelectric Structures
 D. Elata, E. Elka and H. Abramovich
 Technion - Israel Institute of Technology, IL
-Analytical Model for the Pull-in Time of Low-Q MEMS Devices
 L.A. Rocha, E. Cretu and R.F. Wollfenbuttel
 Delft University of Technology, NL
-Finite Element Validation of an Inverse Approach to the Design of an Electrostatic Actuator
 J. Juillard, M. Cristescu and S. Guessab
 SUPELEC, Department of Measurement, FR
-mor4ansys: Generating Compact Models Directly From ANSYS Models
 E.B. Rudnyi, J. Lienemann, A. Greiner and J.G. Korvink
 IMTEK, Albert Ludwig University, DE
-Piecewise Perturbation Method (PPM) Simulation of Electrostatically Actuated Beam with Uncertain Stiffness
 J. Juillard, H. Baili and E. Colinet
 SUPELEC, Department of Measurement, FR
-Dynamic Simulations of a Novel RF MEMS Switch
 M.I. Younis, E.M. Abdel-Rahman and A.H. Nayfeh
 Virginia Tech, US
-Using Topology Derived Masks to Facilitate 3D Design
 R. Schiek and R. Schmidt
 Sandia National Laboratories, US
-Modeling, Fabrication and Experiment of a Novel Lateral MEMS IF/RF Filter
 M. Motiee, A. Khajepour and R.R. Mansour
 University of Waterloo, CA
-Characterization of an Electro-thermal Microactuator with Multi-lateral Motion in Plane
 C.H. Pan, Y.K. Chen and C.L. Chang
 National Chin-Yi Institute of Technology, TW
-MEMS Compact Modeling Meets Model Order Reduction: Examples of the Application of Arnoldi Methods to Microsystem Devices
 J. Lienemann, D. Billger, E.B. Rudnyi, A. Greiner and J.G. Korvink
 IMTEK, Albert Ludwig University, DE
-Guidelines of Creating Krylov-subspace Macromodels for Lateral Viscous Damping Effects
 P-C Yen and Y-J Yang
 National Taiwan University, TW
-Computationally Efficient Dynamic Modeling of MEMS
 D.O. Popa, J. Critchley, M. Sadowski, K.S. Anderson and G. Skidmore
 Rensselaer Polytechnic Institute, US
-Dynamic Modeling and Input Shaping for MEMS
 D.O. Popa, J.T. Wen, H.E. Stephanou, G. Skidmore and M. Ellis
 Rensselaer Polytechnic Institute, US
-Function-Oriented Geometric Design Approach To Surface Micromachined MEMS
 F. Gao and Y.S. Hong
 University of Toledo, US
-New Accurate 3-D Finite Element Technology for Solving Geometrically Complex Coupled-Field Problems
 I. Avdeev, M. Gyimesi, M. Lovell and D. Ostergaard
 University of Pittsburgh, US
-Interdigitated Low-Loss Ohmic RF-MEMS Switches
 R. Gaddi, M. Bellei, A. Gnudi, B. Margesin and F. Giacomozzi
 ARCES - University of Bologna, IT
-Compliant Force Amplifier Mechanisms for Surface Micromachined Resonant Accelerometers
 C.B.W. Pedersen and A.A. Seshia
 University of Cambridge, UK
-Coupling Of Resonant Modes In Micromechanical Vibratory Rate Gyroscopes
 A.S. Phani, A.A. Seshia, M. Palaniapan, R.T. Howe and J. Yasaitis
 University of Cambridge, UK
-Numerical Modeling of a Piezoelectric Micropump
 R. Schlipf, K. Haghighi and R. Lange
 Purdue University, US
-Identification of Anisoelasticity and Nonproportional Damping in MEMS Gyroscopes
 A.S. Phani and A.A. Seshia
 University of Cambridge, UK
-On the Air Damping of Micro-Resonators in the Free-Molecular Region
 S. Hutcherson and W. Ye
 Georgia Institute of Technology, US
-Simulation and Modeling of a Bridge-type Resonant Beam for a Coriolis True Mass Flow Sensor
 S. Lee, X. Wang, W. Shin, Z. Xiao, K.K. Chin and K.R. Farmer
 Microelectronics Research Center, New Jersey Institute of Technology, US
-Computational Prototyping of an RF MEMS Switch using Chatoyant
 M. Bails, J.A. Martinez, S.P. Levitan, I. Avdeev, M. Lovell and D.M. Chiarulli
 University of Pittsburgh, US
-Effective Modelling and Simulation of Over-Heated Actuators
 M. Zubert, M. Napieralska, A. Napieralski and J.L. Noullet
 Technical University of Lodz, PL
-Static and Dynamic Optical Metrology of Micro-Mirror Thermal Deformation
 C.R. Forest, P. Reynolds-Brown, O. Blum Spahn, J. Harris, E. Novak, C.C. Wong, S. Mani, F. Peter and D. Adams
 Sandia National Laboratories, US
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