 | Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 6: MEMS Modeling |
| - | Free Surface Flow and Acousto-Elastic Interaction in Piezo Inkjet |
| | H. Wijshoff |
| | Océ Technologies B.V., NL |
| - | Contact Force Models, including Electric Contact Deformation, for Electrostatically Actuated, Cantilever-Style, RF MEMS Switches |
| | R.A. Coutu_Jr. and P.E. Kladitis |
| | Air Force Institute of Technology, US |
| - | Electromechanical Buckling of a Pre-Stressed Layer Bonded to an Elastic Foundation |
| | S. Abu-Salih and D. Elata |
| | Technion - Israel Institute of Technology, IL |
| - | Three-Dimensional CFD-Simulation of a Thermal Bubble Jet Printhead |
| | T. Lindemann, D. Sassano, A. Bellone, R. Zengerle and P. Koltay |
| | University of Freiburg, DE |
| - | Circuit Modeling and Simulation of Integrated Microfluidic Systems |
| | A.N. Chatterjee and N.R. Aluru |
| | Beckman Institute, US |
| - | Extending the Validity of Existing Squeezed-Film Damper Models with Elongations of Surface Dimensions |
| | T. Veijola, A. Pursula and P. Raback |
| | Helsinki University of Technology, FI |
| - | Feature Length-Scale Modeling of LPCVD and PECVD MEMS Fabrication Processes |
| | L.C. Musson, P. Ho, S.J. Plimpton and R.C. Schmidt |
| | Sandia National Laboratories, US |
| - | Compact Models for Squeeze-Film Damping in the Slip Flow Regime |
| | R. Sattler and G. Wachutka |
| | Technical Univeristy of Münich, DE |
| - | Dynamic Simulation of an Electrostatically Actuated Impact Microactuator |
| | X. Zhao, H. Dankowicz, C.K. Reddy and A.H. Nayfeh |
| | Virginia Tech, US |
| - | Microplate Modeling under Coupled Structural-Fluidic-Electrostatic Forces |
| | M.I. Younis and A.H. Nayfeh |
| | Virginia Tech, US |
| - | A Model for Thermoelastic Damping in Microplates |
| | A.H. Nayfeh and M.I. Younis |
| | Virginia Tech, US |
| - | Design and Modeling of a 3D Micromachined Accelerometer |
| | S.H. Ghafari, M.F. Golnaraghi and R. Mansour |
| | University of Waterloo, CA |
| - | Effect of Thermophysical Property Variations on Surface Micromachined Polysilicon Beam Flexure Actuators |
| | A. Atre and S. Boedo |
| | Rochester Institute of Technology, US |
| - | A New 3D Model of The Electro-Mechanical Response of Piezoelectric Structures |
| | D. Elata, E. Elka and H. Abramovich |
| | Technion - Israel Institute of Technology, IL |
| - | Analytical Model for the Pull-in Time of Low-Q MEMS Devices |
| | L.A. Rocha, E. Cretu and R.F. Wollfenbuttel |
| | Delft University of Technology, NL |
| - | Finite Element Validation of an Inverse Approach to the Design of an Electrostatic Actuator |
| | J. Juillard, M. Cristescu and S. Guessab |
| | SUPELEC, Department of Measurement, FR |
| - | mor4ansys: Generating Compact Models Directly From ANSYS Models |
| | E.B. Rudnyi, J. Lienemann, A. Greiner and J.G. Korvink |
| | IMTEK, Albert Ludwig University, DE |
| - | Piecewise Perturbation Method (PPM) Simulation of Electrostatically Actuated Beam with Uncertain Stiffness |
| | J. Juillard, H. Baili and E. Colinet |
| | SUPELEC, Department of Measurement, FR |
| - | Dynamic Simulations of a Novel RF MEMS Switch |
| | M.I. Younis, E.M. Abdel-Rahman and A.H. Nayfeh |
| | Virginia Tech, US |
| - | Using Topology Derived Masks to Facilitate 3D Design |
| | R. Schiek and R. Schmidt |
| | Sandia National Laboratories, US |
| - | Modeling, Fabrication and Experiment of a Novel Lateral MEMS IF/RF Filter |
| | M. Motiee, A. Khajepour and R.R. Mansour |
| | University of Waterloo, CA |
| - | Characterization of an Electro-thermal Microactuator with Multi-lateral Motion in Plane |
| | C.H. Pan, Y.K. Chen and C.L. Chang |
| | National Chin-Yi Institute of Technology, TW |
| - | MEMS Compact Modeling Meets Model Order Reduction: Examples of the Application of Arnoldi Methods to Microsystem Devices |
| | J. Lienemann, D. Billger, E.B. Rudnyi, A. Greiner and J.G. Korvink |
| | IMTEK, Albert Ludwig University, DE |
| - | Guidelines of Creating Krylov-subspace Macromodels for Lateral Viscous Damping Effects |
| | P-C Yen and Y-J Yang |
| | National Taiwan University, TW |
| - | Computationally Efficient Dynamic Modeling of MEMS |
| | D.O. Popa, J. Critchley, M. Sadowski, K.S. Anderson and G. Skidmore |
| | Rensselaer Polytechnic Institute, US |
| - | Dynamic Modeling and Input Shaping for MEMS |
| | D.O. Popa, J.T. Wen, H.E. Stephanou, G. Skidmore and M. Ellis |
| | Rensselaer Polytechnic Institute, US |
| - | Function-Oriented Geometric Design Approach To Surface Micromachined MEMS |
| | F. Gao and Y.S. Hong |
| | University of Toledo, US |
| - | New Accurate 3-D Finite Element Technology for Solving Geometrically Complex Coupled-Field Problems |
| | I. Avdeev, M. Gyimesi, M. Lovell and D. Ostergaard |
| | University of Pittsburgh, US |
| - | Interdigitated Low-Loss Ohmic RF-MEMS Switches |
| | R. Gaddi, M. Bellei, A. Gnudi, B. Margesin and F. Giacomozzi |
| | ARCES - University of Bologna, IT |
| - | Compliant Force Amplifier Mechanisms for Surface Micromachined Resonant Accelerometers |
| | C.B.W. Pedersen and A.A. Seshia |
| | University of Cambridge, UK |
| - | Coupling Of Resonant Modes In Micromechanical Vibratory Rate Gyroscopes |
| | A.S. Phani, A.A. Seshia, M. Palaniapan, R.T. Howe and J. Yasaitis |
| | University of Cambridge, UK |
| - | Numerical Modeling of a Piezoelectric Micropump |
| | R. Schlipf, K. Haghighi and R. Lange |
| | Purdue University, US |
| - | Identification of Anisoelasticity and Nonproportional Damping in MEMS Gyroscopes |
| | A.S. Phani and A.A. Seshia |
| | University of Cambridge, UK |
| - | On the Air Damping of Micro-Resonators in the Free-Molecular Region |
| | S. Hutcherson and W. Ye |
| | Georgia Institute of Technology, US |
| - | Simulation and Modeling of a Bridge-type Resonant Beam for a Coriolis True Mass Flow Sensor |
| | S. Lee, X. Wang, W. Shin, Z. Xiao, K.K. Chin and K.R. Farmer |
| | Microelectronics Research Center, New Jersey Institute of Technology, US |
| - | Computational Prototyping of an RF MEMS Switch using Chatoyant |
| | M. Bails, J.A. Martinez, S.P. Levitan, I. Avdeev, M. Lovell and D.M. Chiarulli |
| | University of Pittsburgh, US |
| - | Effective Modelling and Simulation of Over-Heated Actuators |
| | M. Zubert, M. Napieralska, A. Napieralski and J.L. Noullet |
| | Technical University of Lodz, PL |
| - | Static and Dynamic Optical Metrology of Micro-Mirror Thermal Deformation |
| | C.R. Forest, P. Reynolds-Brown, O. Blum Spahn, J. Harris, E. Novak, C.C. Wong, S. Mani, F. Peter and D. Adams |
| | Sandia National Laboratories, US |
| ISBN: | 0-9728422-8-4 |
| Pages: | 519 |
| Hardcopy: | $150.00 |
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